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Mechanical response of a single and released InP membrane

Published online by Cambridge University Press:  01 February 2011

Eric Le Bourhis  and
Gilles Patriarche
Eric Le Bourhis
Affiliation:
[email protected], University of Poitiers, Laboratoire de Métallurgie Physique, UMR 6630 CNRS, SP2MI-Téléport 2-Bd Marie et Pierre Curie, BP 30179, Futuroscope-chasseneuil Cedex, F-86962, France, 33-5-4949-6758, 33-5-4949-6692
Gilles Patriarche
Affiliation:
[email protected], CNRS UPR 20, Laboratoire de Photonique et de Nanostructures, Marcoussis, 91460, France
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Abstract

InP membranes have been microfabricated and released on top of an InP substrate. The release process comprises membrane photolithography, interlayer sacrificial etching of a InP/InGaAs/InP substructure and drying with CO2 at critical point. The mechanical response of the obtained small (40 µm) and thin (0.4 µm) membranes could be tested by nanoindentation. While keeping their epitaxial orientation through the fabrication process, delamination of the membrane was observed to occur before the indenting load reached 10 mN. Then cracking of the membrane was detected as a pop-in on the loading curves for loads larger than 10 mN.

Keywords

nanostructureIII-Vstrength
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1049: Symposium AA – Fundamentals of Nanoindentation and Nanotribology IV , 2007 , 1049-AA02-07
Copyright
Copyright © Materials Research Society 2008

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