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Mechanical Properties of CVD Tungsten Fibers
Published online by Cambridge University Press: 25 February 2011
Abstract
Tungsten fibers were fabricated with dimensions relevant to microelectronics and microfabrication. The strength and modulus were 1.57±0.7GPa and 276±lO%GPa, respectively. The failure mode was most consistent with intergranular fracture.
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- Copyright © Materials Research Society 1991