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Measuring Local Mechanical Properties using FIB Machined Cantilevers

Published online by Cambridge University Press:  31 January 2011

David Edward John Armstrong ,
Angus Jonathan Wilkinson  and
Steve George Roberts
David Edward John Armstrong
Affiliation:
[email protected], University of Oxford, Department of Materials, Oxford, United Kingdom
Angus Jonathan Wilkinson
Affiliation:
[email protected], University of Oxford, Department of Materials, Oxford, United Kingdom
Steve George Roberts
Affiliation:
[email protected], University of Oxford, Department of Materials, Oxford, United Kingdom
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Abstract

Micro-scale Focused Ion Beam (FIB) machined cantilevers were manufactured in single crystal copper, polycrystalline copper and a copper-bismuth alloy. These were imaged and tested in bending using a nanoindenter. Cantilevers machined inside a single grain of polycrystalline copper were tested to determine their (anisotropic) Young's modulus: results were in good agreement with values calculated from literature values for single crystal elastic constants. The size dependence of yield behavior in the Cu microcantilevers was also investigated. As the thickness of the specimen was reduced from 23μm to 1.7μm the yield stress increased from 300MPa to 900MPa. Microcantilevers in Cu-0.02%Bi were manufactured containing a single grain boundary of known character, with a FIB-machined sharp notch on the grain boundary. The cantilevers were loaded to fracture allowing the fracture toughness of grain boundaries of different misorientations to be determined.

Keywords

nano-indentationfractureelastic properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1185: Symposium II – Probing Mechanics at Nanoscale Dimensions , 2009 , 1185-II02-08
Copyright
Copyright © Materials Research Society 2009

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