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Measurements and Simulations of Temperatures in Polyimide During Excimer Laser Ablation

Published online by Cambridge University Press:  01 January 1992

D. P. Brunco ,
Michael O. Thompson ,
C. E. Otis  and
P. M. Goodwint
D. P. Brunco
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853
Michael O. Thompson
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853
C. E. Otis
Affiliation:
IBMT. J. Watson Research Center, Yorktown Heights, NY 10598
P. M. Goodwint
Affiliation:
Mail Stop M888, LANL, Los Alamos, NM 87545
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Abstract

The temperature at the interface between a thin polyimide film and a quartz substrate was monitored as a function of time during KrF (248 nm) laser-induced heating and ablation using thin film NiSi thermistors. These experimental temperature measurements were coupled with heat flow simulations to obtain time-resolved temperature profiles in the polyimide. Thermal properties of the polyimide were estimated by requiring that the simulations reproduce experimental temperature profiles. The peak surface temperature in the polyimide at the onset of ablation was subsequently estimated from these simulations, producing a value of 1660 ± 100 K at the observed ablation threshold fluence of 36 mJ/cm2. Simulations were also used to explore the role of pulse duration on polyimide ablation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 285: Symposium I – Laser Ablation in Materials Processing–Fundamentals and Applications , 1992 , 151
Copyright
Copyright © Materials Research Society 1993

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References

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