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Measurement of Electrical Charge During Nanoindentation of Ferroelectric Thin Films

Published online by Cambridge University Press:  17 March 2011

M. Algueró ,
A.J. Bushby  and
M.J. Reece
M. Algueró
Affiliation:
Department of Materials. Queen Mary, University of London. Mile End Road, London E1 4NS, United Kingdom
A.J. Bushby
Affiliation:
Department of Materials. Queen Mary, University of London. Mile End Road, London E1 4NS, United Kingdom
M.J. Reece
Affiliation:
Department of Materials. Queen Mary, University of London. Mile End Road, London E1 4NS, United Kingdom
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Extract

Electrical charge transients have been measured during the nanoindentation of lanthanum modified lead titanate ferroelectric thin films. Using the spherical indenter as the top electrode, the films were locally poled. The films were then reindented at the exact same positions. The origin of the charge released is discussed in terms of piezoelectricity and depolarisation. The depolarisation must have been produced by a stress induced ferroelastic domain reorientation. Current intensity transients recorded during indentation showed a distinct maximum. This maximum corresponded to a force at which the depolarisation rate was a maximum. This provides the basis to define a coercive indentation force, and then a coercive indentation stress.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 657: Symposia EE – Materials Science of Microelectromechanical Systems (MEMS) Devices III , 2000 , EE5.37
Copyright
Copyright © Materials Research Society 2001

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References

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