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Measurement of Effective Longitudinal Piezoelectric Coefficient of thin Films by Direct Piezoelectric Effect

Published online by Cambridge University Press:  10 February 2011

F. Xu ,
F. Chu ,
J. F. Shepard Jr  and
S. Trolier-McKinstry
F. Xu
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
F. Chu
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
J. F. Shepard Jr
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
S. Trolier-McKinstry
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
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Abstract

This paper presents a new method for the measurement of the longitudinal piezoelectric coefficient of piezoelectric thin films using the direct piezoelectric effect. A uniform uniaxial stress was applied to the piezoelectric thin film by high-pressure gas and the induced charge was collected and measured by a charge integrator. The effective longitudinal piezoelectric coefficient of lead zirconate titanate (PZT) 52/48 thin films made by sol-gel processing was measured by this method. Undoped films typically have d33 values of ∼ 5 pC/N, while poled films have values up to 220 pC/N.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 493: Symposium U – Ferroelectric Thin Film VI , 1997 , 427
Copyright
Copyright © Materials Research Society 1998

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References

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