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A Mathematical Representation of the ion Nitriding Process

Published online by Cambridge University Press:  25 February 2011

J -L. Marchand ,
D. Ablitzer ,
J. Szekely ,
H. Michel  and
M. Gantois
J -L. Marchand
Affiliation:
Department of Materials Science and Engineering Massachusetts Institute of Technology Cambridge, MA 02139 U.S.A.
D. Ablitzer
Affiliation:
Laboratoire de Génie Metallurgique Ecole des Mines Parc de Saurupt 54000, Nancy, FRANCE
J. Szekely
Affiliation:
Department of Materials Science and Engineering Massachusetts Institute of Technology Cambridge, MA 02139 U.S.A.
H. Michel
Affiliation:
Laboratoire de Génie Metallurgique Ecole des Mines Parc de Saurupt 54000, Nancy, FRANCE
M. Gantois
Affiliation:
Laboratoire de Génie Metallurgique Ecole des Mines Parc de Saurupt 54000, Nancy, FRANCE
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Abstract

A mathematical formulation and computed results are presented to describe the velocity fields, temperature fields and concentration of the activated species in an ion nitriding process, operated at 1–5 torr pres-sure. The theoretical predictions, which are based on the two-dimensional trasnport equations and on a model for computing the electron number density, gave results in broad agreement with experimental findings reported by others for similar systems.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 98: Symposium K – Plasma Processing and Synthesis of Materials II , 1987 , 67
Copyright
Copyright © Materials Research Society 1987

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References

REFERENCES

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