Hostname: page-component-cd9895bd7-p9bg8 Total loading time: 0 Render date: 2024-12-27T02:33:50.212Z Has data issue: false hasContentIssue false
  • English
  • Français

Materials Development of Thin Film TiNi Ferroelastic-Ferroelectric Heterostructures

Published online by Cambridge University Press:  15 February 2011

A. Peter Jardine
A. Peter Jardine*
Affiliation:
Dept. of Materials Science, SUNY Stony Brook, Stony Brook, N.Y.
Get access

Abstract

Active and adaptive thin film materials for “smart” materials will likely be a heterostructure of several types of thin films. In this investigation, deposition and processing of thin film Shape Memory Effect TiNi and thin film ferroelectric BaTiO3 and SrTiO3 are discussed. Growth conditions as well as the thermodynamic conditions for thin films are described. It was found that amorphous thin films of TiNi and BaTiO3 can be crystallized simultaneously by air annealing at 600°C.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 276: Symposia U/Y – Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems , 1992 , 31
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] “Shape Memory Materials”, Proc.MRS Intl. Meeting on Advanced Materials, Ed. Otsuka, K., Shimizu, K. 9, (1988)Google Scholar
[2] Fuyuya, Y., Shimada, H. et al.,J.Japan.Inst.Metals, 2,139 (1988)Google Scholar
[3] Johnson, A. D., J.Micromech.Microeng., 1, 34 (1991)Google Scholar
[4] Kuribayaski, K., Int. J. Robotics Research, 4, 47 (1988)Google Scholar
[5] Grummon, D. S., Proc.M.R.S. Symp. “Shape Memory Alloys”,248, (to be published)Google Scholar
[6] Jardine, A. P. and Wasielsky, L. D., Proc.M.R.S. Symp., 24, p. 2391 (1990)Google Scholar
[7] ”Thin Film Ferroelectrics”, Proc.M.R.S., 200, Ed. Myers, E. R. and Kingon, A. I., (1990)Google Scholar
[8] Brinker, C. J. and Scherer, G. W., ”Sol-Gel Science”, Academic Press, San Diego(1990)Google Scholar
[9] Wang, F. E. and Beuhler, W. J., Ocean Eng., 1,105 (1968)Google Scholar
[10] Jardine, A. P., Zhang, H. and Halada, G., (unpublished research)Google Scholar
[11] Busch, J. D., Johnson, A. D. et al, J.Appl. Phys., 68, 6224 (1990)CrossRefGoogle Scholar
[12] Madsen, J. and Jardine, A. P., Proc. M.R.S. Symp., “Shape Memory Alloys”, 246 (to be published)Google Scholar