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Low temperature CVD growth of graphene nano-flakes directly on high K dielectrics

Published online by Cambridge University Press:  02 March 2011

Mark H. Rümmeli ,
Alicja Bachmatiuk ,
Arezoo Dianat ,
Andrew Scott ,
Felix Börrnert ,
Imad Ibrahim ,
Shasha Zhang ,
Ewa Borowiak-Palen ,
Gianaurelio Cuniberti  and
Bernd Büchner
Mark H. Rümmeli
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e. V., PF 27 01 16, 01171 Dresden,Germany Technische Universität Dresden, 01062 Dresden, Germany
Alicja Bachmatiuk
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e. V., PF 27 01 16, 01171 Dresden,Germany
Arezoo Dianat
Affiliation:
Technische Universität Dresden, 01062 Dresden, Germany
Andrew Scott
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e. V., PF 27 01 16, 01171 Dresden,Germany
Felix Börrnert
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e. V., PF 27 01 16, 01171 Dresden,Germany
Imad Ibrahim
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e. V., PF 27 01 16, 01171 Dresden,Germany Technische Universität Dresden, 01062 Dresden, Germany
Shasha Zhang
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e. V., PF 27 01 16, 01171 Dresden,Germany
Ewa Borowiak-Palen
Affiliation:
Zachodniopomorski Uniwersytet Technologiczny, Pulaskiego 10, 70322 Szczecin, Poland
Gianaurelio Cuniberti
Affiliation:
Technische Universität Dresden, 01062 Dresden, Germany Division of IT Convergence Engineering and National Center for Nanomaterials Technology,POSTECH, Pohang 790-784, Republic of Korea
Bernd Büchner
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e. V., PF 27 01 16, 01171 Dresden,Germany
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Abstract

The potential of MgO and ZrO2 as catalytically active substrates for graphene formation via thermal CVD is explored. Experimental observations show the growth of single and multi-layer graphene nano-flakes over MgO and ZrO2 at low temperatures. The graphene nano-flakes are found to anchor at step sites. Ab initio calculations indicate step sites are crucial to adsorb and crack acetylene.

Keywords

chemical vapor deposition (CVD) (deposition)catalyticnanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1284: Symposium C – Fundamentals of Low-Dimensional Carbon Nanomaterials , 2011 , mrsf10-1284-c02-02
Copyright
Copyright © Materials Research Society 2011

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References

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