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Low TCE Polyimides from Polyamic Acid Blends and Copolymers: Preparation and Characterization Studies

Published online by Cambridge University Press:  15 February 2011

Krishna G. Sachdev
Affiliation:
IBM, General Technology Division, Hopewell Junction, NY
Sandra Graham-Ode
Affiliation:
IBM, General Technology Division, Hopewell Junction, NY
Thomas L. Nunes
Affiliation:
IBM, General Technology Division, Hopewell Junction, NY
Paul S. Ho
Affiliation:
University of Texas at Austin, Austin TX
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Abstract

A series of polyimides prepared from BPDA-PDA and BTDA-PDA polyamic acid blends and the corresponding (BPDA-PDA)x-(BTDA-PDA)y copolymers have been investigated for the mechanical properties, the thermal expansion, and the residual stress in films cured on silicon wafers. To determine the effect of inclusion of a highly flexible chain segment into BPDA-PDA structure, a BPDA-PDA/BDAF copolyimide has also been characterized. The experimental data are correlated with the chemistry and the composition of the blends and the copolyimides.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

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