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Low Resistivity CoSi2 Surface Layers for Use as Contacts in CMOS Processes
Published online by Cambridge University Press: 28 February 2011
Abstract
Uniform CoSi2 surface layers 30nm thick have been realized through room temperature implantation of Co+ through a resist or an oxide mask and low temperature (600°C) annealing. TEM studies show that the surface layers are polycrystalline with large, uniformly thick grains. Resistivity values as low as 181µΩ-cm have been obtained. Surface layers of TiSi2 have also been synthesized using a similar process. The ease of formation, the low resistivity and the smooth interfaces of the CoSi2 and TiSi2 surface layers make this technique a promising candidate for contacting source and drain junctions in sub-half-micron CMOS processes.
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- Copyright © Materials Research Society 1991
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