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Low Loss Rib-Waveguides in SOI

Published online by Cambridge University Press:  15 February 2011

J. Schmidtchen ,
B. Schüppert ,
A. Splett  and
K. Petermann
J. Schmidtchen
Affiliation:
Technische Universität Berlin, Institut für Hochfrequenztechnik Einsteinufer 25, D-1000 Berlin 10, Germany
B. Schüppert
Affiliation:
Technische Universität Berlin, Institut für Hochfrequenztechnik Einsteinufer 25, D-1000 Berlin 10, Germany
A. Splett
Affiliation:
Technische Universität Berlin, Institut für Hochfrequenztechnik Einsteinufer 25, D-1000 Berlin 10, Germany
K. Petermann
Affiliation:
Technische Universität Berlin, Institut für Hochfrequenztechnik Einsteinufer 25, D-1000 Berlin 10, Germany
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Abstract

The realization of single-mode rib-waveguides with dimensions of several micrometers in Silicon-On-Insulator (SOI) is reported. The predicted monomode behaviour is confirmed by comparison of a simulated and a measured nearfield intensity distribution. Waveguide losses below 0.5dB/cm were obtained at wavelengths of 1.3μm and 1.55μm, respectively, independent of the polarization state.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 244: Symposium J – Optical Waveguide Materials , 1991 , 351
Copyright
Copyright © Materials Research Society 1992

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References

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