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Low Hydrogen Concentration Silicon Nitride as a Gate Dielectric of TFTs for Flexible Display Application

Published online by Cambridge University Press:  01 February 2011

Joong Hyun Park ,
Chang Yeon Kim ,
Kwang Sub Shin ,
Sang Geun Park  and
Min Koo Han
Joong Hyun Park
Affiliation:
School of Electrical Engineering and Computer Science (#50), Seoul National University San 56-1, Shinlim-Dong, Kwanak-Gu, Seoul, 151-742, Korea
Chang Yeon Kim
Affiliation:
School of Electrical Engineering and Computer Science (#50), Seoul National University San 56-1, Shinlim-Dong, Kwanak-Gu, Seoul, 151-742, Korea
Kwang Sub Shin
Affiliation:
School of Electrical Engineering and Computer Science (#50), Seoul National University San 56-1, Shinlim-Dong, Kwanak-Gu, Seoul, 151-742, Korea
Sang Geun Park
Affiliation:
School of Electrical Engineering and Computer Science (#50), Seoul National University San 56-1, Shinlim-Dong, Kwanak-Gu, Seoul, 151-742, Korea
Min Koo Han
Affiliation:
School of Electrical Engineering and Computer Science (#50), Seoul National University San 56-1, Shinlim-Dong, Kwanak-Gu, Seoul, 151-742, Korea
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Abstract

We have proposed low hydrogen concentration (CH) silicon nitride (SiNX) as a dielectric for flexible display application. The fabrication temperature on plastic substrate is limited below Tg (glass transition temperature, typically 130˜180 °C) and it was reported that CH in thin film is strongly depends on fabrication temperature. As the fabrication temperature is decreasing, hydrogen concentration is increasing. SiNX deposited in ultra low temperature (< 150 °C) has high CH which is porous, low density. Our experimental results using SiH4, He, N2 gas mixture shows that in the SiNX CH is less than 15 at.%. Breakdown voltage of proposed SiNX dielectric is 5 MV/cm. In the wet etch rate test using a nitride etching solution, He dilution is more dense than NH3 dilution. This process approach is useful for flexible display application.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 862: Symposium A – Amorphous and Nanocrystalline Silicon Science and Technology–2005 , 2005 , A22.6
Copyright
Copyright © Materials Research Society 2005

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