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Local Bonding Structure of Hydrogen in Crystalline Silicon: NMR and Tem Studies

Published online by Cambridge University Press:  03 September 2012

J. B. Boyce ,
N. M. Johnson ,
S. E. Ready ,
J. Walker  and
G. B. Anderson
J. B. Boyce
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304
N. M. Johnson
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304
S. E. Ready
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304
J. Walker
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304
G. B. Anderson
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304
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Abstract

Nuclear magnetic resonance (NMR) and transmission electron microscopy have been used to obtain information on the local structure of deuterium in single-crystal silicon, both for deuterated, phosphorous-doped Si that contains platelet-structured defects and for deuterated boron-doped silicon. In both cases, the NMR spectrum consists of two components, a narrow doublet and a central, unsplit line. The doublet arises from D bonded to Si with the Si-D bond along the <111> directions. The central line, which contains more D than does the doublet, is ascribed primarily to molecular D2 that resides in regions of the crystal where translation and tumbling are inhibited and possibly to some D in weak Si-D bonds.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 262: Symposium E – Defect Engineering in Semiconductor Growth, Processing and Device Technology , 1992 , 401
Copyright
Copyright © Materials Research Society 1992

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References

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