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Liquid Phase Deposition of Poly(ethylene terephthalate) Films

Published online by Cambridge University Press:  15 March 2011

Robert M. Bryce ,
Hue T. Nguyen ,
Rik R. Tykwinski ,
Ray G. DeCorby ,
Mark R. Freeman  and
Ying Y. Tsui
Robert M. Bryce
Affiliation:
Centre for Nanoscale Physics, 412 Avadh Bhatia Physics Laboratory, Edmonton, Alberta, Canada, T6G 2J1
Hue T. Nguyen
Affiliation:
TRLabs, 7th Floor, 9107 - 116 Street, Edmonton, Alberta, T6G 2V4
Rik R. Tykwinski
Affiliation:
Department of Chemistry, University of Alberta, Edmonton, Alberta, Canada, T6G 2G2
Ray G. DeCorby
Affiliation:
TRLabs, 7th Floor, 9107 - 116 Street, Edmonton, Alberta, T6G 2V4 Department of Electrical & Computer Engineering, University of Alberta, Edmonton, Alberta, Canada, T6G 2V4
Mark R. Freeman
Affiliation:
Centre for Nanoscale Physics, 412 Avadh Bhatia Physics Laboratory, Edmonton, Alberta, Canada, T6G 2J1
Ying Y. Tsui
Affiliation:
Department of Electrical & Computer Engineering, University of Alberta, Edmonton, Alberta, Canada, T6G 2V4
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Abstract

Poly(ethylene terephthalate), or PET, has been widely used in experiments due to its excellent properties and availability in sheets as thin as 1.5 µm. Its resistance to chemical attack makes PET a good choice as an inert substrate, but makes liquid phase deposition of thin films from solution challenging. Further, attempts to deposit films from the vapor phase have shown limited success. High quality PET films are desirable, as PET is transparent, hydrophobic, amenable to micropatterning, and is well characterized. As such, PET films are suited for use in microdevices. We report on liquid phase deposition of PET films, and on characterization of the films using optical methods.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 820: Symposia O/R – Nanoengineered Assemblies and Advanced Micro/Nanosystems , 2004 , O6.6
Copyright
Copyright © Materials Research Society 2004

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References

1. Iroh, J.O., in: Mark, J.E. (Ed.), Polymer Data Handbook, Oxford University Press, 1999.Google Scholar
2. Dyer, P.E., “Excimer laser polymer ablation: twenty years on”, Applied Physics A, 77 (2), 167–173, 2003.Google Scholar
3. Maleki, T., Mohajerzadeh, S., and Afzali-Kusha, A., “Plastic micromachining assisted by ultraviolet illumination”, IEEE Transactions on Electron Devices, 50(8), 1813–1815, 2003.Google Scholar
4. Kalk, F., and Glocker, D., “Thick zone plate fabrication using reactive sputter etching”, Journal of Vacuum Science and Technology, 19(2), 170–172, 1981.Google Scholar
5. Kim, J., and Xu, X.F., “Excimer laser fabrication of polymer microfluidic devices”, Journal of Laser Applications, 15(4), 255–260, 2003.Google Scholar
6. Siwy, Z., Gu, Y., Spohr, H.A., Baur, D., Wolf-Reber, A., Spohr, R., Apel, P., and Korchev, Y.E., “Rectification and voltage gating of ion currents in a nanofabricated pore”, Europhysics Letters, 60(3), 349–355, 2002.Google Scholar
7. Xiang, J., Zhu, P., Masuda, Y., and Koumoto, K., “Fabrication of Self-Assembled Monolayers (SAMs) and Inorganic Micropattern on Flexible Polymer Substrate”, Langmuir, article 10.1021/la036088m S0743-7463(03)06088-8, 2004.Google Scholar
8. Teshima, K., Sugimura, H., Inoue, Y., Takai, O., and Takano, A., “Ultra-Water-Repellent Poly(ethylene terephthalate) Substrates”, Langmuir, 19 (25), 10624–10627, 2003.Google Scholar
9. Shrinet, V., Chaturvedi, U.K., Agrawal, S.K., and Nigam, A.K., “Deposition of thin Mylar films by a vacuum thermal evaporation technique”, Journal of Vacuum Science and Technology, 21 (4), 1040–1042, 1982.Google Scholar
10. Cupere, V.M. De, and Rouxhet, P.G., “Surface crystallization of poly(ethylene terephthalate) studied by atomic force microscopy”, Polymer 43, 5571–5576, 2002.Google Scholar
11. Haubruge, H.G., Daussin, R., Jonas, A.M., and Legras, R., “Morphological study of melt- crystallized poly(ethylene terephthalate): B. Thin films”, Polymer, 44, 8053–8059, 2003.Google Scholar
12. Herzinger, C.M., Johs, B., McGahan, W.A., Woollam, J.A., and Paulson, W., “Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample multi-wavelength, multi-angle investigation”, Journal of Applied Physics, 83(6), 3323–3336, 1998.Google Scholar
13. Tompkin, H.G. and McGahan, W.A., Spectroscopic Ellipsometry and Reflectometry: A Users Guide, Wiley-Interscience, 1999.Google Scholar
14. Goodfellow technical bulletin for poly(ethylene terephalate). http://www.goodfellow.com.Google Scholar