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Light Impurity Depth Profiling in the Nuclear Reaction AnalysiS

Published online by Cambridge University Press:  22 February 2011

Oleg I. Zabashta ,
A.I. Kul'ment'ev  and
V.E. Storizko
Oleg I. Zabashta
Affiliation:
Applied Physics Institute, 244000 Sumy, 2, R.-Korsakov St., Ukraine
A.I. Kul'ment'ev
Affiliation:
Applied Physics Institute, 244000 Sumy, 2, R.-Korsakov St., Ukraine
V.E. Storizko
Affiliation:
Applied Physics Institute, 244000 Sumy, 2, R.-Korsakov St., Ukraine
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Extract

The general problem in the analysis of a sample by non-destructive techniques such as nuclear microanalysis, ellipsometry, etc. is the interpretation of the measured data. The impurity depth profile obtained may noticeable non-physical fluctuations. From the mathematical point of view this could be explain by the fact that while interpreting the results we have to solve an incorrect problem to which routine computational methods are not applicable.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 316: Symposium A – Materials Synthesis and Processing Using Ion Beams , 1993 , 1065
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

1 Kul'ment'ev, A.I., Storizhko, V.E., Zabashta, O.I. (1993) Nucl. Instr. Meth. (in press) Proc. 11 -nd International Conference on Ion Beam Analysis.Google Scholar
2 Zabashta, O.I., Kul'ment'ev, A.I., Storizhko, V.E. // Izvestiya Vuzov. Fizika -1993. -v.5, P.79–86.Google Scholar
3 Zabashta, O.I., Kul'ment'ev, A.I., Storizhko, V.E. et al. //Ukr. Fiz. J.,l993.-v.4, P.494–500.Google Scholar