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Laser-Induced Surface Modification and Etching of Materials
Published online by Cambridge University Press: 26 February 2011
Abstract
Laser-induced surface reduction and ablation of piezoelectric oxides is described for the examples of BaTi03 and LiNb03.
The microscopic mechanisms involved in the laser-induced etching of single-crystal (100) Si in Cl2 atmosphere are investigated for the regime of low laser powers.
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- Copyright © Materials Research Society 1998
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