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Laser-Induced Deposition of Gold

Published online by Cambridge University Press:  28 February 2011

Thomas H. Baum
Thomas H. Baum*
Affiliation:
IBM Almaden Research Center, San Jose, California 95120-6099
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Abstract

The laser-induced, vapor-phase deposition of gold metal from dimethyl-(2,4-pentanedionato) gold (III) and two fluorinated derivatives was examined by both photopyrolytic (LCVD) and photochemical modes of decomposition. High purity gold deposits are formed by LCVD with the rates of deposition being extremely vapor pressure dependent and thus, gold complex dependent. Photochemical deposition of gold patterns with 2 μm resolution can be achieved by irradiation of these complexes in the UV, but the deposited material is contaminated with carbon impurities.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 75: Symposium B – Photon, Beam, and Plasma Stimulated Chemical Processes at Surfaces , 1986 , 141
Copyright
Copyright © Materials Research Society 1987

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