Hostname: page-component-cd9895bd7-gbm5v Total loading time: 0 Render date: 2024-12-27T01:40:36.797Z Has data issue: false hasContentIssue false
  • English
  • Français

Large-Area Pulsed Laser Deposition (PLD)

Published online by Cambridge University Press:  15 February 2011

R. Dietsc ,
Th. Holzs ,
H. Mai ,
M. Panzner  and
S. Völlmar
R. Dietsc
Affiliation:
FhG IWS Dresden, HelmholtzstraBe 20, D-01069 Dresden, Germany
Th. Holzs
Affiliation:
FhG IWS Dresden, HelmholtzstraBe 20, D-01069 Dresden, Germany
H. Mai
Affiliation:
FhG IWS Dresden, HelmholtzstraBe 20, D-01069 Dresden, Germany
M. Panzner
Affiliation:
FhG IWS Dresden, HelmholtzstraBe 20, D-01069 Dresden, Germany
S. Völlmar
Affiliation:
FhG IWS Dresden, HelmholtzstraBe 20, D-01069 Dresden, Germany
Get access

Abstract

PLD of uniform thin films on 4”-wafers has been realized by the integration of a PLD-source into a commercial MBE-system. Thickness homogeneity over the total substrate area is obtained by precise spatial control of the plasma plumes excited simultaneously at 4 adjacent target locations. Computer controlled motion of a cylindrical target with respect to the stationary focal spots of the laser beams, has to provide (a) a suitable deflection of the plume axis and (b) a uniform target erosion. Process control was investigated by computer simulations. The efficiency of the developed technique for large area coating is illustrated by the preparation of DLC thin film specimens and their ellipsometric characterization

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 382: Symposium G – Structure and Properties of Multilayered Thin Films , 1995 , 83
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Greer, J.A., in Superconductivity and Applications, edited by Kwok, H.S., Kao, Y. and Shaw, D., (Plenum, New York, 1989), p. 117 Google Scholar
[2] Eringon, K.B. and Ianno, N.J., Rev. Sci. Instrum. 63, 3525, (1992)Google Scholar
[3] Eddy, M. presented at the 1991 MRS Fall Meeting, Boston, MA, 1991 Google Scholar
[4] Smith, E. J. presented at the 1992 MRS Fall Meeting, Boston, MA, 1992 Google Scholar
[5] Greer, J.A., J. Vac. Sci. Technol. A10, 1821, (1992)Google Scholar
[6] Foltyn, S.R. et al. , Appl. Phys. Lett. 59, 1374, (1991)Google Scholar
[7] Dietsch, R., Mai, H., Pompe, W. and Vollmar, S., Advanced Materials for Optics and Electronics 2, 19, (1993)Google Scholar
[8] Mai, H., Dietsch, R., Holz, Th., Völlmar, S., Hopfe, S., Scholz, R., Weißbrodt, P., Krawietz, R., Wehner, B., Eichler, H. and Wendrock, H., in Optical Interference Coatings, edited by Abele, F., (SPIE 2253, Washington, 1994), pp. 268–289 Google Scholar