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Large-Area Deposition of Carbon Nanotubes for Field Emission Displays

Published online by Cambridge University Press:  15 March 2011

Young-Jun Park ,
In-Taek Han ,
Ha-Jin Kim ,
Yun-Sung Woo ,
Nae-Sung Lee ,
Yong-Wan Jin ,
Jae-Eun Jung ,
Chong-Yun Park  and
Jong-Min Kim
Young-Jun Park
Affiliation:
FED Project, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon, 440-600, Korea Department of Vacuum Science of Technology, Sungkyunkwan University, Suwon, 440-746, Korea
In-Taek Han
Affiliation:
FED Project, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon, 440-600, Korea Department of Chemistry, Seoul National University, Seoul, 151-742, Korea
Ha-Jin Kim
Affiliation:
FED Project, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon, 440-600, Korea
Yun-Sung Woo
Affiliation:
FED Project, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon, 440-600, Korea
Nae-Sung Lee
Affiliation:
Department of Advanced Materials Engineering, Sejong University, Seoul, 143-747, Korea
Yong-Wan Jin
Affiliation:
FED Project, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon, 440-600, Korea Department of Materials Engineering, Sungkyunkwan University, Suwon, 440-746, Korea
Jae-Eun Jung
Affiliation:
FED Project, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon, 440-600, Korea Department of Materials Engineering, Sungkyunkwan University, Suwon, 440-746, Korea
Chong-Yun Park
Affiliation:
Department of Vacuum Science of Technology, Sungkyunkwan University, Suwon, 440-746, Korea
Jong-Min Kim
Affiliation:
FED Project, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon, 440-600, Korea
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Abstract

A direct synthesis of carbon nanotubes (CNTs) on substrates by chemical vapor deposition (CVD) is one of highly probable routes to reach their application to field emission displays. Several stringent requirements are prerequisite for this purpose, including low temperature growth below 600°C to engage glass substrates and large area deposition for practical use. This study carried out synthesis of CNTs by thermal CVD on glass substrates at temperatures as low as 500~550°C. CNTs were grown by thermal decomposition of CO and H2 gases at an atmospheric pressure for different thickness of Invar (an Fe-Ni-Co alloy ) catalytic layers. The growth of CNTs was strongly correlated with preparation of catalytic layers. The diameters and heights of as-grown CNTs increased as the catalytic layers became thicker from 2nm to 30nm. Measurements of the field emission properties of CNTs showed that the threshold electric fields were lowered with increasing thickness of catalytic layers. A uniform electron emission was observed over a large area of 150 × 150mm2, with high emission currents and high brightness.

Type
Article
Information
MRS Online Proceedings Library (OPL) , Volume 706: Symposium Z – Making Functional Materials with Nanotubes , 2001 , Z6.8.1
Copyright
Copyright © Materials Research Society 2002

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References

1. Iijima, S.; Nature 354, 56 (1991).Google Scholar
2. Ebbesen, T. W., Carbon nanotubes; New Jersey, CRC press, 1997.Google Scholar
3. Heer, W.A. de, Chatelain, A. and Ugarte, D.; Science, 270, 1179 (1995)Google Scholar
4. Saito, Y., Hamaguchi, K., Hata, K., Uchida, K., Tasaka, Y., Ikazaki, F., Yumura, M., Kasuya, A. and Nishina, Y.; Nature 389, 554 (1997).Google Scholar
5. Kim, J.M., Choi, W.B., Lee, N.S. and Jung, J.E.; Diamond Rel. Mater. 9, 1184 (2000).Google Scholar
6. Chen, Y., Shaw, D.T. and Guo, L.; Appl. Phys. Lett. 76, 2469 (2000).Google Scholar
7. Ren, Z.F., Hung, Z.P., Xu, J.W., Wang, J.H., Bush, P., Siegal, M.P. and Provencio, P.N.; Science 282, 1105 (1998).Google Scholar
8. Li, W.Z., Xie, S.S., Qian, L.X., Chang, B.H., Zou, B.S., Zhou, W.Y.; Science 274, 1701 (1996).Google Scholar
9. Fan, S., Chapline, M.G., Frankle, N.R., Tombler, T.W., Cassell, A.M. and Dai, H.; Science 283, 512 (1999).Google Scholar
10. Choi, W.B., Jung, D.S., Kang, J.H., Kim, H.Y., Jin, Y.W., Han, I.T., Lee, Y.H., Jung, J.E., Lee, N.S., Park, G.S. and Kim, J.M.; Appl. Phys. Lett. 75, 3129 (1999).Google Scholar
11. Choi, Y.S., Kang, J.H., Park, Y.J., Choi, W.B., Lee, C.J., Jo, S.H., Lee, C.G., You, J.H., Jung, J.E., Lee, N.S. and Kim, J.M.; Diam. Relat. Mater. 10, 1705 (2001).Google Scholar
12. Han, J.H., Yoo, J.B., Park, C.Y., Kim, H.J., Park, G.S., Yang, M., Han, I.T., Lee, N.S., Yi, W.K., Yu, S.G. and Kim, J.M.; to be published in J. Appl. Phys.Google Scholar