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Large Scale Periodic Magnetic Nanostructures Fabricated by Optical Interference Lithography

Published online by Cambridge University Press:  15 March 2011

A. Carl ,
S. Kirsch  and
E.F. Wassermann
A. Carl
Affiliation:
Gerhard-Mercator-Universität Duisburg, Tieftemperaturphysik, 47048 Duisburg, Germany
S. Kirsch
Affiliation:
Gerhard-Mercator-Universität Duisburg, Tieftemperaturphysik, 47048 Duisburg, Germany
E.F. Wassermann
Affiliation:
Gerhard-Mercator-Universität Duisburg, Tieftemperaturphysik, 47048 Duisburg, Germany
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Abstract

Large scale periodic arrays of Co/Pt multilayer dots with perpendicular magnetic anisotropy are fabricated utilizing optical interference lithography with Ar+ ion lasers operating at wavelengths of 457nm and 244nm, respectively. The experimental technique allows us to fabricate dot-arrays with periodicities ranging between 125nm and 1100nm and with corresponding dot diameters between 70nm and 740nm. The dot-arrays are prepared on (100)-silicon substrates covering a total area of up to 20cm2 with a maximum dot density of about 4.1x1010dots/in2 as well as within the surface of (110)-silicon substrates. The global magnetic properties of the dot-arrays are characterized by the magneto-optical Kerr effect. The micromagnetic properties of a single Co/Pt dot are measured with quantitative magnetic force microscopy (QMFM) by using a MFM-tip, the magnetic properties of which have been calibrated within the point probe approximation with nanofabricated current carrying rings. This allows us to measure quantitatively the z-component of both the magnetization and the stray field of a Co/Pt dot on the nanometer scale.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 705: Symposium Y – Nanopatterning–From Ultralarge-Scale Integration to Biotechnology , 2001 , Y9.2
Copyright
Copyright © Materials Research Society 2002

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