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Kinetics of Rapid Thermal Oxidation : Critical Analysis of Experimental Results

Published online by Cambridge University Press:  25 February 2011

J-M. Dilhac
J-M. Dilhac*
Affiliation:
LAAS-CNRS, 7 avenue du colonel Roche, 31077 Toulouse Cedex, France
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Abstract

In this paper, we present experimental kinetics data from the literature, and the large discrepancies between them is discussed. An analytical equation for oxide thickness vs. oxidation time and temperature, adequatly describing thin film growth, is used to estimate the temperature error likely to explain the discrepancy between the above data. We also assess this error by considering the temperature sensors.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 146: Symposium B – Rapid Thermal Annealing/Chemical Vapor Deposition and Integrated Processing , 1989 , 333
Copyright
Copyright © Materials Research Society 1989

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References

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