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Ion-beam Assisted Deposition of MgO with in situ RHEED Monitoring to Control Bi-axial Texture

Published online by Cambridge University Press:  21 March 2011

James R. Groves ,
Paul N. Arendt ,
Stephen R Foltyn ,
Quanxi Jia ,
Raymond F. DePaula ,
Paul C. Dowden ,
Harriet Kung ,
Terry G. Holesinger ,
Liliana Stan  and
Luke A. Emmert
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James R. Groves
Affiliation:
Materials Science Division, Los Alamos National Laboratory Los Alamos, NM, 87545
Paul N. Arendt
Affiliation:
Materials Science Division, Los Alamos National Laboratory Los Alamos, NM, 87545
Stephen R Foltyn
Affiliation:
Materials Science Division, Los Alamos National Laboratory Los Alamos, NM, 87545
Quanxi Jia
Affiliation:
Materials Science Division, Los Alamos National Laboratory Los Alamos, NM, 87545
Raymond F. DePaula
Affiliation:
Materials Science Division, Los Alamos National Laboratory Los Alamos, NM, 87545
Paul C. Dowden
Affiliation:
Materials Science Division, Los Alamos National Laboratory Los Alamos, NM, 87545
Harriet Kung
Affiliation:
Materials Science Division, Los Alamos National Laboratory Los Alamos, NM, 87545
Terry G. Holesinger
Affiliation:
Materials Science Division, Los Alamos National Laboratory Los Alamos, NM, 87545
Liliana Stan
Affiliation:
Materials Science Division, Los Alamos National Laboratory Los Alamos, NM, 87545
Luke A. Emmert
Affiliation:
Materials Science Division, Los Alamos National Laboratory Los Alamos, NM, 87545
Eric J. Peterson
Affiliation:
Materials Science Division, Los Alamos National Laboratory Los Alamos, NM, 87545
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Abstract

We have studied the growth of magnesium oxide using ion-beam assisted deposition (IBAD) to achieve (100) oriented, bi-axially textured films with low mosaic spread, for film thicknesses of 10 nm on silicon substrates. We have refined the process by using reflected high-energy electron diffraction (RHEED) to monitor the growth of IBAD MgO films and found that the diffracted intensity can be used to determine (and ultimately control) final in-plane texture of the film. Here we present results on our work to develop the use of real-time RHEED monitoring to deposit well-oriented IBAD MgO films. The results have been corroborated with extensive grazing-incidence X-ray diffraction (GID). Results of these analyses have allowed us to deposit films on metallic substrates with in-plane mosaic spread less than 7°.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 666: Symposium F – Transport and Microstructural Phenomena , 2001 , F10.6
Copyright
Copyright © Materials Research Society 2001

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References

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