Hostname: page-component-f554764f5-8cg97 Total loading time: 0 Render date: 2025-04-09T10:12:45.034Z Has data issue: false hasContentIssue false
  • English
  • Français

Ion Beam Channeling in Superlattices

Published online by Cambridge University Press:  25 February 2011

Wei-Kan Chu ,
W. R. Allen ,
S. T. Picraux  and
J. A. Ellison
Wei-Kan Chu
Affiliation:
University of North Carolina, Dept. of Physics & Astronomy, Chapel Hill, NC 27514
W. R. Allen
Affiliation:
University of North Carolina, Dept. of Physics & Astronomy, Chapel Hill, NC 27514
S. T. Picraux
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
J. A. Ellison
Affiliation:
Dept. of Mathematics, U. of New Mexico, Albuquerque, NM 87131
Get access

Abstract

Ion beam channeling analysis has recently been applied to lattice strain measurements on strained-layer superlattices (SLS). In this review talk, we outline three different methods of strain measurement: axial dechanneling, angular scans, and planar resonance. We describe the principles and illustrate them with examples; we also give a detailed theoretical treatment of the planar resonance effect in SLS's.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 69: Symposium D – Materials Characterization , 1986 , 69
Copyright
Copyright © Materials Research Society 1986

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

1. Osbourn, G.C., J. Appl. Phys. 53, 1586 (1982).CrossRefGoogle Scholar
2. Mathews, J.W. and Blakeslee, A.E., J. Vac. Sci. Technol. 14, 989 (1977).Google Scholar
3. Esaki, L. and Tsu, R., IBM J. Res. Dev. 14, 61 (1970).Google Scholar
4. Cho, A.Y. and Arthur, J.R., in Progress in Solid State Chemistry, edited by Somorjai, G.A. and McCaldin, J. (Pergamon, NY, 1975) 10, p.157.Google Scholar
5. Chang, L.L. and Ludeke, R., in Epitaxial Growth, edited by Mathews, J. (Academic, NY, 1975) Part A, p.37.Google Scholar
6. Mayer, J.W., Ziegler, J.F., Chang, L.L., Tsu, R., and Esaki, L., J. Appl. Phys. 44, 2322 (1973).Google Scholar
7. Chu, W.K., Mayer, J.W., and Nicolet, M-A., Backscattering Spectrometry (Academic, NY, 1978).Google Scholar
8. Chu, W.K., Mayer, J.W., Nicolet, M-A., Buck, T.M., Amset, G., and Eisen, F., Thin Solid Films 17, 1 (1973).Google Scholar
9. Saris, F.W., Chu, W.K., Chang, C.A., Ludeke, R., and Esaki, L., Appl. Phys. Lett. 37, 931 (1980).Google Scholar
10. Chu, W.K., Saris, F.W., Chang, C.A., Ludeke, R., and Esaki, L., Phys. Rev. B26, 1999 (1982).Google Scholar
11. Barrett, J.H., Appl. Phys. Lett. 40, 482 (1982).Google Scholar
12. Barrett, J.H., Phys. Rev. B28, 2328 (1983).Google Scholar
13. Picraux, S.T., Chu, W.K., Allen, W.R., and Ellison, J.A., Proc. 7th.Int. Conf. on Ion Beam Analysis, Berlin (1985), Nucl. Inst. Methods B15, 306 (1986).Google Scholar
14. Picraux, S.T., Dawson, L.R., Osbourn, G.C., and Chu, W.K., Appl. Phys. Lett. 43, 930 (1983).CrossRefGoogle Scholar
15. Picraux, S.T., Dawson, L.R., Osbourn, G.C., and Chu, W.K., Nucl. Inst. Methods 218, 57 (1983).Google Scholar
16. Chu, W.K., Pan, C.K., and Chang, C.A., Phys. Rev. B28, 4033 (1983).Google Scholar
17. Pan, C.K., Zheng, D.C., Finstad, T.G., Chu, W.K., Speriosu, V.S., Nicolet, M-A., and Barrett, J.H., Phys. Rev. B31, 1270 (1985).Google Scholar
18. Picraux, S.T., Dawson, L.R., Osbourn, G.C., Biefeld, R.M., and Chu, W.K., Appl. Phys. Lett. 43, 1020 (1983).Google Scholar
19. Chu, W.K., Ellison, J.A., Picraux, S.T., Biefeld, R.M., and Osbourn, G.C., Phys. Rev. Lett. 52, 125 (1984).Google Scholar
20. Chu, W.K., Allen, W.R., Ellison, J.A., and Picraux, S.T., Nucl. Inst. Methods B13, 39 (1986).Google Scholar
21. Chu, W.K., Ellison, J.A., Picraux, S.T., Biefeld, R.M., and Osbourn, G.C., Nucl. Inst. Methods 218, 81 (1983).CrossRefGoogle Scholar
22. Picraux, S.T., Allen, W.R., Biefeld, R.M., Ellison, J.A., and Chu, W.K., Phys. Rev. Lett. 54, 2355 (1985).Google Scholar
23. Ellison, J.A., Picraux, S.T., Allen, W.R., and Chu, W.K., Phys. Rev. B (to be submitted).Google Scholar
24. Picraux, S.T., Allen, W.R., Chu, W.K., and Ellison, J.A., Phys. Rev. B (to be submitted).Google Scholar
25. Chu, W.K., Allen, W.R., Picraux, S.T., and Ellison, J.A., Phys. Rev. B (to be submitted).Google Scholar
26. Allen, W.R., Chu, W.K., Picraux, S.T., and Ellison, J.A., Phys. Rev. B (to be submitted).Google Scholar