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Ion Beam Channeling in Superlattices

Published online by Cambridge University Press:  25 February 2011

Wei-Kan Chu ,
W. R. Allen ,
S. T. Picraux  and
J. A. Ellison
Wei-Kan Chu
Affiliation:
University of North Carolina, Dept. of Physics & Astronomy, Chapel Hill, NC 27514
W. R. Allen
Affiliation:
University of North Carolina, Dept. of Physics & Astronomy, Chapel Hill, NC 27514
S. T. Picraux
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
J. A. Ellison
Affiliation:
Dept. of Mathematics, U. of New Mexico, Albuquerque, NM 87131
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Abstract

Ion beam channeling analysis has recently been applied to lattice strain measurements on strained-layer superlattices (SLS). In this review talk, we outline three different methods of strain measurement: axial dechanneling, angular scans, and planar resonance. We describe the principles and illustrate them with examples; we also give a detailed theoretical treatment of the planar resonance effect in SLS's.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 69: Symposium D – Materials Characterization , 1986 , 69
Copyright
Copyright © Materials Research Society 1986

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