Hostname: page-component-cd9895bd7-7cvxr Total loading time: 0 Render date: 2024-12-27T01:49:01.932Z Has data issue: false hasContentIssue false
  • English
  • Français

Investigations on the Real-Time Monitoring of the Crystallinity of Hydrogenated Microcrystalline Silicon Films

Published online by Cambridge University Press:  01 February 2011

Christoph Ross ,
Friedhelm Finger  and
Reinhard Carius
Christoph Ross
Affiliation:
Institute of Photovoltaics (IPV), Forschungszentrum Jülich, D-52425 Jülich, Germany
Friedhelm Finger
Affiliation:
Institute of Photovoltaics (IPV), Forschungszentrum Jülich, D-52425 Jülich, Germany
Reinhard Carius
Affiliation:
Institute of Photovoltaics (IPV), Forschungszentrum Jülich, D-52425 Jülich, Germany
Get access

Abstract

A method for monitoring the evolution of the crystallinity during the deposition of thin hydrogenated silicon films by using in situ spectroscopic ellipsometry is presented. The crystallinity of the topmost 10-20 nm of a film is derived from the analysis of the shape of ellipsometric spectra in the UV range. The values are closely related to parameters of the deposition process and in good agreement with Raman scattering results. Examples of different kinds of microcrystalline silicon films are shown. Improvements of the time resolution and/or accuracy are discussed. The method turns out to be well suited for process control.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 762: Symposium A – Amorphous and Nanocrystalline Silicon-Based Films – 2003 , 2003 , A13.4
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Yang, J., Lord, K., Guha, S., Ovshinsky, S.R., Mater. Res. Soc. Symp. Proc. 609, A 15.4 (2001).Google Scholar
[2] Collins, R.W., Ferlauto, A.S., Ferreira, G.M., Chen, C., Koh, J., Koval, R.J., Lee, Y., Pearce, J.M., Wronski, C.R., Solar Energy Materials and Solar Cells (2003), in press.Google Scholar
[3] Houben, L., Luysberg, M., Hapke, P., Carius, R., Finger, F., Wagner, H., Phil. Mag. A 77, 1447 (1998).Google Scholar
[4] Fujiwara, H., Kondo, M., Matsuda, A., J. Appl. Phys. 91, 4181 (2002).Google Scholar
[5] Vetterl, O., Finger, F., Carius, R., Hapke, P., Houben, L., Kluth, O., Lambertz, A., Mueck, A., Rech, B., Wagner, H., Solar Energy Materials and Solar Cells 62 (2000) 97.Google Scholar
[6] Vetterl, O., Hülsbeck, M., Wolff, J., Carius, R., Finger, F., Thin Solid Films 427, 46 (2003).Google Scholar
[7] Ross, C., Finger, F., Carius, R., Proc. Int. Conf. “PV in Europe”, p. 55 (2002).Google Scholar
[8] Kumar, S., Drévillon, B., Godet, C., J. Appl. Phys. 60 (1986) 1542.Google Scholar