Hostname: page-component-586b7cd67f-r5fsc Total loading time: 0 Render date: 2024-11-23T11:33:39.588Z Has data issue: false hasContentIssue false
  • English
  • Français

Investigation of the Crystalline Orientations and Substrates Dependence on Mechanical Properties of PZT Thin Films by Nanoindentation

Published online by Cambridge University Press:  01 February 2011

Dan Liu ,
Sang H Yoon ,
Bo Zhou ,
Barton C Prorok  and
Dong-Joo Kim
Dan Liu
Affiliation:
[email protected], Auburn University, Materials Engineering, Auburn, Alabama, United States
Sang H Yoon
Affiliation:
[email protected], Auburn University, Materials Engineering, Auburn, Alabama, United States
Bo Zhou
Affiliation:
[email protected], Auburn University, Materials Engineering, Auburn, Alabama, United States
Barton C Prorok
Affiliation:
[email protected], Auburn University, Materials Engineering, Auburn, Alabama, United States
Dong-Joo Kim
Affiliation:
[email protected], Auburn University, Materials Engineering, Auburn, Alabama, United States
Get access

Abstract

In this paper, we investigated the effects of the substrates and crystalline orientations on the mechanical properties of Pb(Zr0.52Ti0.48)O3 thin films. The PZT thin films were deposited by sol-gel method on platinized silicon substrates with different types of layer materials such as silicon nitride and silicon oxide. The crystalline orientations of PZT thin films were controlled by combined parameters of a chelating agent and pyrolysis temperature. A nanoindentation CSM (continuous stiffness measurement) technique was employed to characterize the mechanical properties of those PZT thin films. It was observed that (001/100)-oriented films show a higher Young’s modulus compared to films with mixed orientations of (110) and (111), indicating a clear dependence on film orientation. The influence of substrates on the mechanical properties of PZT thin films was also characterized. Finally, no significant influence of the film thickness was found on the mechanical properties of films thicker than 200 nm.

Keywords

nano-indentationpiezoelectricthin film
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1129: Symposium V – Materials and Devices for Smart Systems III , 2008 , 1129-V11-05
Copyright
Copyright © Materials Research Society 2009

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Kanno, , Fujii, S., Kamada, T., and Takayama, R., “Piezoelectric properties of c-axis oriented Pb(Zr, Ti)O3 thin films”, Appl. Phys. Lett. 70, 1378 (1997).Google Scholar
2. Jaffe, B., Cook, W. R., and Jaffe, H., Piezoelectric Ceramics, London: Academic press, 1971, pp 271–280.Google Scholar
3. Wang, Q. M., Ding, Y. P., Chen, Q. M., Zhao, M. H., and Chen, J. R., Appl. Phys. Lett. 86, 162903 (2005).Google Scholar
4. Delobelle, P., Fribourg-Blanc, E., and Remiens, D., Thin Sol. Films 515, 1385 (2006).Google Scholar
5. Delobelle, P., Wang, G.S., Fribourg-Blanc, E., and Remiens, D., J. Eur. Ceram. Soc. 27, 223 (2007).Google Scholar
6. Fang, T-H, Jian, S-R, and Chuu, D-S, J. Phys.: Condens. Matter 15, 5253 (2003).Google Scholar
7. Xu, X.H., Gu, P., jiang, R., Zhao, G., Wen, L. and Chu, J.R., Proceedings of 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 18 (2006).Google Scholar
8. Bahr, D.F., Robach, J.S., Wright, J.S., Francis, L.F. and Gerberich, W.W., Mater. Sci. Eng., A259, 126 (1999).Google Scholar
9. Chima-Okereke, C., Bushby, A.J., Reece, M.J., Whatmore, R.W. and Zhang, Q., J. Mater. Res., 21, 409 (2006).Google Scholar
10. Oliver, W.C. and Pharr, G.M., J. Mater. Res. 7, 1564 (1992).Google Scholar
11. Standard Test for Microhardness of Materials, “ASTM Standard Test Method E 384,” Annual Book of Standards 3.01, American Society for Testing and Materials, p 469, 1989 Google Scholar
12. Peggs, G.N., Leigh, I.C., Recommended procedure for microindentation Vickers hardness test, Report MOM 62, UK National Physical Laboratory, 1983.Google Scholar
13. Zheng, X.J., Zhou, Y.C., Li, Y.Y., Acta Mater. 51, 3985 (2003).Google Scholar
14. Delobelle, P., Wang, G.S., Fribourg-Blanc, E., and Remiens, D., Surf. Coat. Technol. 201, 3155 (2006).Google Scholar
15. Hay, J. L. and Pharr, G. M. Instrumented indentation testing. In ASM Handbook, Vol. 8: Mechanical Testing and Evaluation, 10th ed. (Kuhn, H. and Medlin, D., eds.). ASM International, 232–243, 2000.Google Scholar
16. Panich, N. and Sun, Y., “Effect of penetration depth on indentation response of soft coatings on hard substrates: a finite element analysis”, Surface and Coatings Technology 182, 342 (2004).Google Scholar
17. Chen, X. and Vlassak, J.J., “Numerical study on the measurement of thin film mechanical properties by means of nanoindentation”, J. Mater. Res., 16, 10 (2001).Google Scholar