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Investigation of the Characteristics of Ferroelectric Thin Films Deposited by Pulsed Laser Ablation

Published online by Cambridge University Press:  15 February 2011

S. Sengupta ,
D.P. Vijay  and
S.B. Desu
S. Sengupta
Affiliation:
U.S. Army Research Laboratory, Materials Directorate, Watertown MA 02172–0001
D.P. Vijay
Affiliation:
Dept. of Materials Science and Engineering, Virginia Tech, Blacksburg, VA 24061
S.B. Desu
Affiliation:
Dept. of Materials Science and Engineering, Virginia Tech, Blacksburg, VA 24061
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Abstract

Ferroelectric thin films of barium strontium titanate (BSTO) have been deposited on bare and metallized substrates by pulsed laser ablation method under different oxygen ambients (150 mT and 50 mT). Under an oxygen pressure of 150 mT, the film composition was similar to that of its ablation target composition, viz. Ba0.4TiO3. However, when the films were deposited under the lower oxygen pressure, x-ray diffraction studies showed the presence of a secondary phase. The electrical characteristics of the films were measured to examine the effect of the stoichiometry on the dielectric constant and tunability. The results of this study will be presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 361: Symposium I2 – Ferroelectric Thin Films IV , 1994 , 545
Copyright
Copyright © Materials Research Society 1995

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References

REFERENCES

1. Sengupta, L.C., Stowell, S., Ngo, E., O'Day, M.E. and Lancio, R., of Integrated Ferroelectrics, (1994), in press.Google Scholar
2. Babbitt, R., Koscica, T., Drach, W., and Didomenico, D., of Integrated Ferroeiectrics, (1994), in press.Google Scholar
3. Sengupta, S., Sengupta, L.C., Stowell, S., Kosik, W.E., Ngo, E., Vijay, D.K., and Desu, S.B., IEEE transactions of the Proceedings of ISAF ' 94 (in press).Google Scholar