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Interface Stress in Artificial Multilayers

Published online by Cambridge University Press:  26 February 2011

J.A. Ruud ,
A. Witvrouw  and
F. Spaepen
J.A. Ruud
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 01238
A. Witvrouw
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 01238
F. Spaepen
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 01238
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Abstract

A new method for measuring interface stress is presented. The curvature of substrates coated with artificial multilayers is measured as a function of bilayer repeat length. The interface stress is determined from the slope of the curvature plotted versus inverse repeat length. As an example, the (111) Au/amorphous Al2O3 interface stress was determined to be 1.13±0.06 J/m2 (compressive) . X-ray and TEM observations allowed the possibility of interfacial phases to be ruled out as possible alternative sources of the stress.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 209: Symposium K – Defects in Materials , 1990 , 737
Copyright
Copyright © Materials Research Society 1991

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References

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