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Interdigital Capacitive Array of tree-like Carbon Nanotubes on Silicon-based Membranes for Sensor Applications

Published online by Cambridge University Press:  31 January 2011

Aida Ebrahimi ,
Yaser Abdi ,
Shamsoddin Mohajerzadeh  and
Sarah Paydavosi
Aida Ebrahimi
Affiliation:
[email protected], University of Tehran, ECE, Tehran, Iran, Islamic Republic of
Yaser Abdi
Affiliation:
[email protected], University of Tehran, Tehran, Iran, Islamic Republic of
Shamsoddin Mohajerzadeh
Affiliation:
[email protected], University of Tehran, ECE, Tehran, Iran, Islamic Republic of
Sarah Paydavosi
Affiliation:
[email protected], University of Tehran, ECE, Tehran, Iran, Islamic Republic of
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Abstract

We have grown tree-like vertically-aligned carbon nanotubes (CNTs) on silicon substrate, suitable for highly sensitive interdigital capacitive sensors. As an application, we present a sensitive pressure sensor with branched CNTs as its capacitance plates.

After realization of the interdigital structure, the growth of CNTs has been achieved through direct-current plasma enhanced chemical vapor deposition (DC-PECVD) method. A sequential growth and hydrogenation has led to the formation of multiple branched structures of nanotubes. The growth of tree-like CNTs on the interdigitally patterned substrate results in a high overlap between adjacent fingers and consequently a significant response to mechanical variations of the membrane as a result of the applied pressure.

Keywords

microelectro-mechanical (MEMS)nanostructureplasma-enhanced CVD (PECVD) (chemical reaction)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1179: Symposium BB – Material Systems and Processes for Three-Dimentional Micro-and Nanoscale Fabrication and Lithography , 2009 , 1179-BB06-07
Copyright
Copyright © Materials Research Society 2009

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References

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