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Intense UV-Visible-IR Adjustable Photoluminescence from Silicon-rich Oxynitride Layers Prepared by Plasma Enhanced Chemical Vapor Deposition

Published online by Cambridge University Press:  10 February 2011

Zingway Pei ,
Y.J. Chung ,
H.L. Hsiao  and
H.L. Hwang
Zingway Pei
Affiliation:
Dept. of Electrical Engineering, Tsing Hua University, Hsin-Chu, 30043, Taiwan R.O.C.
Y.J. Chung
Affiliation:
Dept. of Electrical Engineering, Tsing Hua University, Hsin-Chu, 30043, Taiwan R.O.C.
H.L. Hsiao
Affiliation:
Dept. of Electrical Engineering, Tsing Hua University, Hsin-Chu, 30043, Taiwan R.O.C.
H.L. Hwang
Affiliation:
Dept. of Electrical Engineering, Tsing Hua University, Hsin-Chu, 30043, Taiwan R.O.C.
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Abstract

The intense UV-visible-IR adjustable light emissions from silicon-rich oxynitride thin films without any thermal annealing were observed at room temperature under a 325 nm He-Cd laser excitation. The silicon-rich oxynitride thin films were deposited by plasma enhanced chemical vapor deposition (PECVD) with the mixture of 5% Ar diluted silane and nitrous oxide gases. The strong naked-eye recognizable photoluminescence (blue-white-red) could be adjusted by changing the process gas flow ratio τ =([SiH4]/[N20]). To the best of our knowledge, intense and adjustable UV-blue light emissions in the as-deposited thin films are first reported in this work. The Fourier Transform infrared (FTIR) spectroscopy was applied to investigate the microstructure-bonding configurations, in which silicon polysilane related bonding at 830-890 cm' present that silicon complex, exists along with the Si-O-Si bonding. X-ray photoelectron spectroscopy was used to investigate the binding configuration, the binding energy of Si 2p appearing at 99.3 eV was indicative of formation of the silicon clusters. As a consequence, we suppose that the visible-IR lights emissions might possible be strongly related to silicon clusters formation in the films and the intense UV emissions might come from the oxygen-related defects.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 560: Symposium E – Luminescent Materials , 1999 , 113
Copyright
Copyright © Materials Research Society 1999

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References

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