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Published online by Cambridge University Press: 31 January 2011
Silicon nanowire arrays grown by chemical vapour deposition were successfully integrated into functional photovoltaic devices. A crucial planarization step, achieved by embedding the nanowires in a spin-on glass matrix and subsequent polishing of the front surface, allowed to deposit a continuous and uniform conductive film on top of the nanowire array, and thus to form a high-quality front electrical contact. The silicon nanowire array solar cells fabricated using this process exhibited a parasitic series resistance as low as 5 Ω.cm2, which is a clear improvement compared to the recent literature.