Hostname: page-component-78c5997874-8bhkd Total loading time: 0 Render date: 2024-11-06T09:39:03.650Z Has data issue: false hasContentIssue false
  • English
  • Français

Integrated Piezoelectric and Pyroelectric Devices from Thin Film Ferroelectrics

Published online by Cambridge University Press:  25 February 2011

M. Sayer ,
C.V.R. Vasant Kumar ,
D. Barrow ,
Li Zou  and
D.T. Amm
M. Sayer
Affiliation:
Department of Physics, Queen's University, Kingston, Ontario, Canada K7L 3N6
C.V.R. Vasant Kumar
Affiliation:
Department of Physics, Queen's University, Kingston, Ontario, Canada K7L 3N6
D. Barrow
Affiliation:
Department of Physics, Queen's University, Kingston, Ontario, Canada K7L 3N6
Li Zou
Affiliation:
Department of Physics, Queen's University, Kingston, Ontario, Canada K7L 3N6
D.T. Amm
Affiliation:
Department of Physics, Queen's University, Kingston, Ontario, Canada K7L 3N6
Get access

Abstract

Thin PZT films 1-4 μm in thickness prepared by sputtering or sol gel methods allow PZT films to be integrated with silicon technology to achieve piezoelectric or pyroelectric structures having small size or mass. Design criteria, materials and processing techniques for such devices are discussed, and the implementation of small size devices on silicon substrates is demonstrated. Factors of importance are the piezoelectric and pyroelectric characteristics achievable in the films, mechanical strength and fatigue, and the stability and compatibility of the films and electrodes with device fabrication procedures and operating conditions.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 243: Symposium G – Ferroelectric Thin Films II , 1991 , 39
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Ferroelectric Thin Films, Mat. Res. Soc. Proc., 200 (Eds. Kingon, A.I. and Myers, E.R., MRS 1991)Google Scholar
2. Krupanidhi, S.B., Sayer, M., El-Assal, K., Jen, C.K. and Farnell, G.W., J.Can.Ceram.Soc., 54, 28 (1984)Google Scholar
3. Okuyama, M. and , Yhamakawa, Ferroelectrics, 63, 243 (1985)Google Scholar
4. Sreenivas, K., Sayer, M., Barr, D.J. and Nishioka, M., Appl. Phys. lett., 52,709 (1988)Google Scholar
5. Ichinose, N., Hirao, Y., Nakamoto, N. and Yamashita, T., Jap. J. Appl. Phys. 23, Suppl. 24-2 463 (1985)Google Scholar
6. Adachi, G., Mitsuyu, T., Yamazaki, O. and Was, K., J. Appl.Phys. 60, 763 (1986)Google Scholar
7. Dieulesaint, E. and Royer, D., Elastic Waves in Solids, (John Wiley, Toronto 1974), 307 Google Scholar
8. Okayama, M., Seto, H. Kojima, M., Matsui, Y. and Hamakawa, Y., Jap.J.Appl.Phys., 21, Suppl. 21-1, 225 (1982)Google Scholar
9. Adachi, H., Kawaguchi, T., Setsune, K., Ohji, K. and Wasa, K., Appl.Phys.Letts., 42. 867 (1983)Google Scholar
10. Sayer, M., Mansingh, A., Arora, A.K. and Lo, A., Int. Ferroelectrics, January 1992 Google Scholar
11. Barrow, D., Kumar, C.V.R. Vasant, Pascual, R. and Sayer, M., MRS Proceedings - paper 12.5, Boston, December 1991 Google Scholar
12. Sreenivas, K. et al, In Ferroelectric Thin Films, 2009, 251 (1989)Google Scholar
13. Ogawa, T., Shindou, S., Senda, A. and Kasanami, T., MRS paper 12.2, Boston, December 1991 Google Scholar
14. Sreenivas, K., Sayer, M. and Garrett, P., Thin Sol. Films, 172,251 (1989)Google Scholar
15. Yi, G., Wu, Z. and Sayer, M., J.Appl.Phys. 84,26 (1988)Google Scholar
16. Yi, G. and Sayer, M., Amer.Ceram.Bull. 70, 1173 (1991)Google Scholar
17. Kumar, C.V.R.Vasant, Sayer, M., Pascual, R., Amm, D.T., Wu, Z. and Swantson, D.M., Appl.Phys.Letts. 58, 1161 (1991)Google Scholar
18. Barr, D.J., Sayer, M. and Sreenivas, K., J. Can. Ceram. Soc., 56, 64 (1987)Google Scholar
19. Griswold, E.M., Sayer, M. and Calder, I.D., Can.J.Phys. 69, 260 (1991)Google Scholar
20. Udayakumar, K.R., Chen, J., Brooks, K.G., Cross, L.E., Flynn, A.M., Bart, S., Tavrov, L.S., Brooks, R.A. and Erlich, D.J., MRS Symposium Proc. Symposium I, Boston, Fall 1991 Google Scholar
21. Ye, C., Tamagawa, T., Lin, Y. and Polla, D., MRS Symposium Proc. Symposium I, Boston, Fall 1991 Google Scholar