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In-Situ Synthesis and Magnetically Stabilized Kyropoulos Growth of Undoped Indium Phosphide

Published online by Cambridge University Press:  25 February 2011

Stephen Bachowski ,
Brian S. Ahern ,
Robert M. Hilton  and
Joseph A. Adamski
Stephen Bachowski
Affiliation:
Rome Air Development Center, Hansom AFB, MA 01731
Brian S. Ahern
Affiliation:
Rome Air Development Center, Hansom AFB, MA 01731
Robert M. Hilton
Affiliation:
Rome Air Development Center, Hansom AFB, MA 01731
Joseph A. Adamski
Affiliation:
Parke Mathematical Laboratories, Carlisle, MA 01741
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Abstract

The Kyropoulos growth technique has been combined with in-situ synthesis to yield high purity undoped crystals of 300 to 700 gm charges of InP. Etched wafers show a uniform dislocation density across 70mm diameter in contrast with the "W" pattern created by LEC. Use of an axial magnetic field in Kyropoulos growth reduces the dislocation density by an order of magnitude, to 1 × 104cm-2. By combining Kyropoulos growth with in-situ synthesis of the indium phosphide, high mobility (4.6×104 at 77 C) undoped single crystals have been obtained.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 163: Symposium G – Impurities, Defects and Diffusion in Semiconductors: Bulk and Layered Structures , 1989 , 1007
Copyright
Copyright © Materials Research Society 1990

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