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In-Situ Rheed-Traxs Monitoring Alloy Composition of the Surface During RF-MBE Growth of GaInN and AIGaN
Published online by Cambridge University Press: 10 February 2011
Abstract
In-situ reflection high energy electron diffraction total reflection angle X-ray spectroscopy (RHEED-TRAXS) was performed to monitor alloy composition at the surface during growth of nitrides by RF-MBE for the first time. TRAXS signal of the GaLα line is found to be more sensitive to the composition at the surface than the GaKαline. A difference in the composition of layer adsorbed on the surface and the solid alloy layer has been identified.
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- Copyright © Materials Research Society 1998