Hostname: page-component-78c5997874-mlc7c Total loading time: 0 Render date: 2024-11-17T18:11:44.751Z Has data issue: false hasContentIssue false
  • English
  • Français

In Situ Spectroscopic Ellipsometry for Real Time Semiconductor Growth Monitor†

Published online by Cambridge University Press:  25 February 2011

Blaine Johs ,
Duane Meyer ,
Gerald Cooney ,
Huade Yao ,
Paul G. Snyder ,
John A. Woollam ,
John Edwards  and
George Maracas
Blaine Johs
Affiliation:
J.A. Woollam Co., 315 South 9th, Suite 22, Lincoln, NE 68508
Duane Meyer
Affiliation:
J.A. Woollam Co., 315 South 9th, Suite 22, Lincoln, NE 68508
Gerald Cooney
Affiliation:
J.A. Woollam Co., 315 South 9th, Suite 22, Lincoln, NE 68508
Huade Yao
Affiliation:
Center for Microelectronic and Optical Materials Research, and Department of Electrical Engineering, University of Nebraska, Lincoln, NE 68588-0511
Paul G. Snyder
Affiliation:
Center for Microelectronic and Optical Materials Research, and Department of Electrical Engineering, University of Nebraska, Lincoln, NE 68588-0511
John A. Woollam
Affiliation:
Center for Microelectronic and Optical Materials Research, and Department of Electrical Engineering, University of Nebraska, Lincoln, NE 68588-0511
John Edwards
Affiliation:
Center for Solid State Electronics Research, Arizona State University, Tempe, AZ 85287
George Maracas
Affiliation:
Center for Solid State Electronics Research, Arizona State University, Tempe, AZ 85287
Get access

Abstract

A modular spectroscopic ellipsometer for in situ and ex situ materials analysis is described, and results for in situ MBE growth of GaAs/AlGaAs are reported.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 216: Symposium T – Long-Wavelength Semiconductor Devices, Materials and Processes , 1990 , 459
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Footnotes

†

Research supported by DARPA Contract DAAH01-89-C-0357, NASA Lewis Grant NAG-3-154, and DARPA/URI Contract N00014-89-J-3120.

References

† Research supported by DARPA Contract DAAH01-89-C-0357, NASA Lewis Grant NAG-3-154, and DARPA/URI Contract N00014-89-J-3120.