Hostname: page-component-78c5997874-94fs2 Total loading time: 0 Render date: 2024-11-17T21:25:05.752Z Has data issue: false hasContentIssue false
  • English
  • Français

In Situ Characterization of the Pulsed Laser DepositIon of Magnetic Thin Films

Published online by Cambridge University Press:  25 February 2011

A.J. Paul ,
D.W. Bonnell ,
J.W. Hastie ,
P.K. Schenck ,
R.D. Shull  and
J.J. Ritter
A.J. Paul
Affiliation:
National Institute of Standards and Technology. Gaithersburg, MD, 20899
D.W. Bonnell
Affiliation:
National Institute of Standards and Technology. Gaithersburg, MD, 20899
J.W. Hastie
Affiliation:
National Institute of Standards and Technology. Gaithersburg, MD, 20899
P.K. Schenck
Affiliation:
National Institute of Standards and Technology. Gaithersburg, MD, 20899
R.D. Shull
Affiliation:
National Institute of Standards and Technology. Gaithersburg, MD, 20899
J.J. Ritter
Affiliation:
National Institute of Standards and Technology. Gaithersburg, MD, 20899
Get access

Abstract

Pulsed Laser Deposition (PLD) has been proven as an effective means of depositing films from refractory targets. In our earlier work, either Nd/YAG or excimer lasers, interacting directly with target surfaces, were used to deposit thin films of high Tc superconductors, high dielectric constant BaTiO3 and ferroelectric PbZr0.53Ti0.47O3 (PZT). Time-resolved molecular beam mass spectrometry and optical emission spectroscopic techniques have been developed to characterize the vapor plumes responsible for film formation. More recently, this work has been extended to the PLD of magnetic thin films of Ag- Fe3O4 nanocomposites using excimer (ArF*, 193 nm) laser excitation. Optical emission spectra of the excited vapor phase species, formed during the plume generation and material deposition process, indicate that physically compressed powdered metal targets have inadequate homogeneity for film production, compared to targets that are chemically produced. An in situ Laser-induced Vaporization Mass Spectrometry (LVMS) technique utilizing a Nd/YAG (1064 nm) laser has been used to determine Time of-Arrival (TOA) profiles of the atomic, molecular, and ionic species produced in the plumes of Ag-Fe3O4. The neutral species TOA profiles indicate velocity distributions that are multimodal and not Maxwellian. These observations are in contrast to the TOA profiles observed from one-component targets (Ag or Fe3O4), where a single Maxwellian velocity distribution is found. Mössbauer effect measurements of the thin films have been made for correlation with the gas phase studies.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 236: Symposium B – Photons and Low Energy Particles in Surface Processing , 1991 , 455
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Bonnell, D.W., Schenck, P.K., Hastie, J.W., and Joseph, M., Proceedings of the Symposium on High Temperature Chemistry, (Electro. Chem. Soc, NJ, 1990).Google Scholar
2. Cowin, J.P., Auerbach, D.J., Becker, C., and Wharton, L., Surf. Sci. 78, 280 (1979).Google Scholar
3. Kelly, R.,and Dreyfus, R.W., Nucl. Instr. and Meth., B32, 341 (1988).Google Scholar
4. Kelly, R., SPIE, 1056, Photochemistry in Thin Films, 258 (1989).Google Scholar
5. Hastie, J.W., Bonnell, D.W., and Schenck, P.K., High Temperature Sci., 25, 117 (1988).Google Scholar
6. Schenck, P.K., Bonnell, D.W., and Hastie, J.H., High Temp. High Pres., 20, 73(1988).Google Scholar
7. Reader, J. and Corliss, C.H., Wavelengths and Transition Probabilitiesfor Atoms and Atomic Ions Part L, NSRDS-NBS 68, (US Gov. Printing Off., Washington, DC, 1980).Google Scholar
8. Ritter, J.J., Details to be published elsewhere.Google Scholar
9. Kundig, W., Bommel, H., Constabaris, G., and Lindquist, R., Phys. Rev. 142, 327 (1966).Google Scholar
10. Shull, R. D., Atzmony, U., Shapiro, A. J., Swartzendruber, L. J., Bennett, L. H., Green, W. L., and Moorjani, K., J. Appl. Phys., 63, 4261 (1988).CrossRefGoogle Scholar