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Imaging Cross Section of X-ray Multilayer Mirror by Scanning Tunneling Microscope
Published online by Cambridge University Press: 15 February 2011
Extract
Multilayers are used in x-ray optics as mirrors.1 They usually consist of a stack of bi-layers of two different materials. For x-ray optics, the thickness of the bi-layer, or the d-spacing of the multilayer, ranges from 2 nm to 20 nm. Since x-ray multilayers are usually made by evaporation or sputtering technique, most of materials in multilayers are amorphous or polycrystalline.
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- Research Article
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- Copyright © Materials Research Society 1995
References
REFERENCES
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