Hostname: page-component-586b7cd67f-dlnhk Total loading time: 0 Render date: 2024-11-29T07:27:15.141Z Has data issue: false hasContentIssue false

I/F Noise Measurements in Al-Si, Al-Si-V and Al-Si-V-Pd Alloy Films

Published online by Cambridge University Press:  22 February 2011

J.R. Kraayeveld
Affiliation:
DIMES, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
R.A. Augur
Affiliation:
Philips Research Laboratories, Prof. Holstlaan 4, 5656 AA Eindhoven, The Netherlands
A.G. Dirks
Affiliation:
Philips Research Laboratories, Prof. Holstlaan 4, 5656 AA Eindhoven, The Netherlands
A.H. Verbruggen
Affiliation:
DIMES, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
S. Radelaar
Affiliation:
DIMES, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
Get access

Abstract

The electromigration lifetime of Al-Si (1 at.% Si) can be greatly increased by alloying with V and Pd (0.1 at.% V, 0.1 at.% Pd). This study reports on l/fα (α≈l) noise measurements in Al-Si, Al-Si-V and Al-Si-V-Pd alloy films. Samples were prepared by direct current (DC) sputtering, e-beam lithography and reactive-ion etching. The samples were annealed at 450 °C for 30 min and were not passivated. Test line dimensions were 800μm×l.2μm×0.5μm. 1/f noise was measured by a high-resolution alternating current (AC) bridge technique, which ensured that no electromigration occurred during the measurements. The sample-to-sample variation in normalized 1/f noise intensity for Al-Si, Al-Si-V and, Al-Si-V-Pd, measured at room temperature, was less than 10%. The smallest noise intensities were observed in the Al-Si-V-Pd films. The temperature dependence of the 1/f noise of Al-Si films shows a maximum at 338 K allowing the determination of the activation energy of the noise generating process (Ea = 0.75 eV). Above 400 K the resistance of the samples became unstable preventing reliable noise measurements. The instabilities were probably caused by the dissolution of very small Si precipitates (<10 nm). This is important information because the dissolution will also take place during electromigration lifetime experiments.

Type
Research Article
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Dirks, A.G. and Augur, R.A., Appl. Phys. Lett. 64, 704 (1994)Google Scholar
[2] Dirks, A.G., Augur, R.A., and Veirman, A.E.M. de, Thin Solid Films 1994 Google Scholar
[3] Massalski, T.B., Murray, J.L., Bennett, L.H., and Baker, H., Binary Alloy Phase Diagrams, (American Soc. for Met., Metals Park, OH, 1986) pp. 103108 Google Scholar
[4] Weissman, M.B., Rev. Mod. Phys. 60, 537 (1988)Google Scholar
[5] Vossen, J. L., Appl. Phys. Lett. 23, 287 (1973)Google Scholar
[6] Dutta, P. and Horn, P., Rev. Mod. Phys. 53, 497 (1981)Google Scholar
[7] Koch, R.H., Lloyd, J.R., and Cronin, J., Phys. Rev. Lett. 55, 2487 (1985)Google Scholar
[8] Kraayeveld, J.R., Verbruggen, A.H., and Radelaar, S., Proc. of the 3rd Europ. Symp. on Reliab. of Electron Dev.. Failure Phys. and Analysis (ESREF92), Schwäbisch Gmünd, Germany, pp. 377378 (1992)Google Scholar
[9] Kraayeveld, J.R., Verbruggen, A.H. and Radelaar, S. in Materials Reliability in Microelectronics, edited by Rodbell, K.P., Filter, W.F., Frost, H.J., and Ho, P.S. (Mater. Res. Soc. Proc. 309, Pittsburgh, PA, 1993) pp. 307312 Google Scholar
[10] Verbruggen, A.H., Stoll, H., Heeck, K., and Koch, R.H., Appl. Phys. A 48, 233 (1989)Google Scholar
[11] Cottle, J.G., Chen, T.M., and Rodbell, K.P., Procs. 26 th. Int. Rel. Physics Symposium (IEEE, NY), pp. 203–8 (1988)T.M. Chen, P. Fang, and J.G. Cottle, Procs. 10 th. Int. Conf. Noise in Physical Systems, pp. 515-8 (1989), Publ. Akademia Kiado, Budapest, HungaryGoogle Scholar
[12] Scofield, J.H., Mantese, J.V., and Webb, W.W., Phys. Rev. B 32, 736, (1985)Google Scholar