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Hydrothermally Deposited PZT Thin Films With Vertically Oriented Columnar Growth

Published online by Cambridge University Press:  01 February 2011

Scott Solberg ,
Alexandra Rodkin ,
Baomin Xu  and
Karl Littau
Scott Solberg
Affiliation:
Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA, USA.
Alexandra Rodkin
Affiliation:
Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA, USA.
Baomin Xu
Affiliation:
Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA, USA.
Karl Littau
Affiliation:
Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA, USA.
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Abstract

A novel growth mode for hydrothermal films of lead zirconate titanate (PZT) has been discovered. Previously reported hydrothermal PZT films have had a loosely-packed cubic morphology, and indeed that is the most common growth mode. However, under special growth conditions, with much more dilute reagent concentrations than previously reported, substantially vertically oriented, long rod shaped grains may be grown. Metal-organic reagents such as lead acetate trihydrate, zirconium propoxide, and titanium isopropoxide were used along with potassium hydroxide mineralizer. Metal and metal-coated substrates with appropriate perovskite seed layers, such as lead titanate (PT) and PZT were used. Unlike other film deposition methods, such as sputtering, MOCVD, or sol-gel, which typically require greater than 500°C processing temperatures, the hydrothermal processes described in this report allowed the growth of highly crystalline films at temperatures as low as 120°C. The unique vertical rod-like ferroelectric films may be useful in electrical devices such as capacitors.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 784: Symposium C – Ferroelectric Thin Films XII , 2003 , C11.40
Copyright
Copyright © Materials Research Society 2004

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