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Hydrogen Diffusion in Zinc Oxide Thin Films

Published online by Cambridge University Press:  31 January 2011

Wolfhard Beyer ,
Uwe Breuer ,
Frank Hamelmann ,
Jürgen Hüpkes ,
Andrea Stärk ,
Helmut Stiebig  and
Uwe Zastrow
Wolfhard Beyer
Affiliation:
[email protected], Forschungszentrum Jülich GmbH, IEF5-Photovoltaik, Jülich, Germany
Uwe Breuer
Affiliation:
[email protected], Forschungszentrum Jülich GmbH, Zentralabteilung für Chemische Analysen, Jülich, Germany
Frank Hamelmann
Affiliation:
[email protected], Malibu GmbH & Co.KG, Jülich, Germany
Jürgen Hüpkes
Affiliation:
[email protected], Forschungszentrum Jülich GmbH, IEF5-Photovoltaik, Jülich, Germany
Andrea Stärk
Affiliation:
[email protected], Forschungszentrum Jülich GmbH, Zentralabteilung für Chemische Analysen, Jülich, Germany
Helmut Stiebig
Affiliation:
[email protected], Malibu GmbH & Co.KG, Jülich, Germany
Uwe Zastrow
Affiliation:
[email protected], Forschungszentrum Jülich GmbH, IEF5-Photovoltaik, Jülich, Germany
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Abstract

Hydrogen diffusion in zinc oxide thin films was studied by secondary ion mass spectrometry (SIMS) measurements, investigating the spreading of implanted deuterium profiles by annealing. By effusion measurements of implanted rare gases He and Ne the microstructure of the material was characterized. While for material prepared by low pressure chemical vapour deposition an interconnected void structure and a predominant diffusion of molecular hydrogen was found, sputter-deposited ZnO films showed a more compact structure and long range diffusion of atomic hydrogen. Hydrogen diffusion energies of 1.8 – 2 eV, i.e. higher than reported in literature were found. The results are discussed in terms of a H diffusion model analogous to the model applied for hydrogen diffusion in hydrogenated amorphous and microcrystalline silicon.

Keywords

II-VIdiffusionmicrostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1165: Symposium M – Thin-Film Compound Semiconductor Photovoltaics–2009 , 2009 , 1165-M05-24
Copyright
Copyright © Materials Research Society 2009

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