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Hydrogen Diffusion in Boron Doped Diamond: Evidence of Hydrogen-Boron Interactions

Published online by Cambridge University Press:  10 February 2011

J. Chevallier ,
B. Theys ,
C. Grattepain ,
A. Deneuville  and
E. Gheeraert
J. Chevallier
Affiliation:
Laboratoire de Physique des Solides de Bellevue, CNRS, 1 place A.Briand, 92195 Meudon Cedex, France
B. Theys
Affiliation:
Laboratoire de Physique des Solides de Bellevue, CNRS, 1 place A.Briand, 92195 Meudon Cedex, France
C. Grattepain
Affiliation:
Laboratoire de Physique des Solides de Bellevue, CNRS, 1 place A.Briand, 92195 Meudon Cedex, France
A. Deneuville
Affiliation:
Laboratoire d'Etudes des Propriétés Electroniques des Solides, CNRS, BP 166, 38042 Grenoble, France
E. Gheeraert
Affiliation:
Laboratoire d'Etudes des Propriétés Electroniques des Solides, CNRS, BP 166, 38042 Grenoble, France
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Abstract

Deuterium diffusion has been investigated in boron doped diamond as a function of the diffusion temperature and the boron concentration. The results show that, up to 480°C, hydrogen diffusion is limited by the boron concentration with a diffusion activation energy of 0.35 eV for [B] = 5×1019 cm−3. This first experimental evidence of deuterium-boron interactions in diamond is interpreted as the result of hydrogen ionization and diffusion of fairly mobile protons which form pairs with negatively charged boron acceptors

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 510: Symposium D – Defect & Impurity Engineered Semiconductors & Devices II , January 1998 , 169
Copyright
Copyright © Materials Research Society 1998

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