Hostname: page-component-cd9895bd7-jkksz Total loading time: 0 Render date: 2024-12-27T02:35:15.506Z Has data issue: false hasContentIssue false
  • English
  • Français

HWCVD-grown Silicon Nanocrystals : A study of the effect of annealing on structures evolved with varying growth rates

Published online by Cambridge University Press:  31 January 2011

Prantik Mahajan ,
Tarkeshwar C Patil  and
Subhananda Chakrabarti
Prantik Mahajan
Affiliation:
[email protected], Indian Institute of Technology Bombay, Electrical Enginering, Mumbai 400076, India
Tarkeshwar C Patil
Affiliation:
[email protected], Indian Institute of Technology Bombay, Electrical Enginering, Mumbai 400076, India
Subhananda Chakrabarti
Affiliation:
[email protected], Indian Institute of Technology Bombay, Electrical Enginering, Mumbai 400076, India
Get access

Abstract

In this work, we investigated the evolution of Silicon Nanostructures with progressive annealing under different growth conditions. A structure - SixNy/a-Si/SixNy/a-Si - was grown on n-type <100> Silicon substrate using Hot Wire CVD (HWCVD) deposition technique. We report here the growth of Silicon Nanostructures by HWCVD technique with a special focus on the nature and morphology of the nanostructures with variation in growth rate and post-annealing temperature. AFM studies revealed promising results hinting at the presence of Silicon Nanostructures. With progressive annealing the morphology of the Nanostructures changed from particles to sharp pillars particularly in one of the samples elaborated in the text below. FWHM from the Confocal Raman data at room temperature was found to be 3.19 cm−1 with the a-Si peak at 520 cm−1.

Keywords

chemical vapor deposition (CVD) (deposition)nanostructurethin film
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1178: Symposium AA – Semiconductor Nanowires–Growth, Size-Dependant Properties and Applications , 2009 , 1178-AA06-13
Copyright
Copyright © Materials Research Society 2009

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Ŝvrcŝek, V., Slaoui, A., Muller, J.C., “Silicon nanocrystals as light converter for solar cells”, Thin Solid Films 451-452 (2004) 384–388.Google Scholar
2 Elliman, Robert G., Wilkinson, Andrew R., Smith, Nathanael, Spooner, Marc G. and Weijers, Tessica D.M., “Light Emission from Silicon Nanocrystals – Size Does Matter”, Journal of the Korean Physical Society, Vol. 45, December 2004, pp. S656_S660.Google Scholar
3 Basa, P., Petrik, P. Fried, M. Dobos, L. Pe'cz, B., To'th, L., “Si nanocrystals in silicon nitride: An ellipsometric study using parametric semiconductor models”, Physica E 38 (2007) 76–79.Google Scholar
4 Cheong, Hea-Jeong, Kang, Jung Hyun, Kim, Jae Kwon and Kim, Yong, “Growth of Highly Luminescent Silicon Nanocrystals by Rapid Thermal Chemical Vapor Deposition”, Key Engineering Materials Vols. 277-279 (2005) pp 977–982.Google Scholar
5 Cheong, H.J, Nakamine, Y. Hippo, D. Uchida, K. and Oda, Shunri, “Silicon nanocrystals light-emitters for optical interconnects”.Google Scholar
6 Nozaki, Tomohiro, Sasaki, Kenji, Ogino, Tomohisa, Asahi, Daisuke and Okazaki, Ken, “Microplasma synthesis of tunable photoluminescent silicon nanocrystals”, Nanotechnology 18 (2007) 235603.Google Scholar
7 Heitmann, J. Moller, F. Zacharias, M. and Gosele, U. “Silicon Nanocrystals : Size Matters”, Adv. Mater. 2005, 17, No. 7, April 4.Google Scholar
8 Wu, M. H. Mu, R. Ueda, A. and Henderson, D. O. “Micro Raman Spectroscopy of Silicon Nanocrystals Produced by Picosecond Pulsed Laser Ablation”, Mat. Res. Soc. Symp. Proc. Vol. 738, 2003.Google Scholar
9 Gouadec, Gwe'naël, Colomban, Philippe, “Raman Spectroscopy of nanomaterials: How spectra relate to disorder, particle size and mechanical properties”, Progress in Crystal Growth and Characterization of Materials 53 (2007) 1–56.Google Scholar
10 Wu, M. H. Mu, R. Ueda, A. and Henderson, D. O. “Micro Raman Spectroscopy of Silicon Nanocrystals Produced by Picosecond Pulsed Laser Ablation”, Mat. Res. Soc. Symp. Proc. Vol. 738, 2003.Google Scholar
11 Campbell, T. I. and Faucet, P. Solid State Commun. 58, 739 (1986).Google Scholar