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High Sensitivity Sensor Based on Porous Silicon Waveguide

Published online by Cambridge University Press:  01 February 2011

Guoguang Rong ,
Jarkko J. Saarinen ,
John E. Sipe  and
Sharon M. Weiss
Guoguang Rong
Affiliation:
[email protected], Vanderbilt University, Electrical Engineering, VU Station B #351824, 2301 Vanderbilt Place, Nashville, TN, 37235-1824, United States, 615-343-8311, 615-343-6702
Jarkko J. Saarinen
Affiliation:
[email protected], University of Toronto, Department of Physics and Institute for Optical Sciences, 60 St. George Street, Toronto, Ontario, M5S 1A7, Canada
John E. Sipe
Affiliation:
[email protected], University of Toronto, Department of Physics and Institute for Optical Sciences, 60 St. George Street, Toronto, Ontario, M5S 1A7, Canada
Sharon M. Weiss
Affiliation:
[email protected], Vanderbilt University, Electrical Engineering, VU Station B #351824, 2301 Vanderbilt Place, Nashville, TN, 37235-1824, United States
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Abstract

Porous silicon (PSi) waveguides are fabricated as a new platform for high sensitivity biosensors. Biomolecules infiltrated into the PSi waveguide increase the effective refractive index of the waveguide and change the angle at which incident light couples into a waveguide mode. Due to the high surface area to volume ratio of PSi and the confinement of optical energy in the region where the biomolecules reside, the waveguide resonance is very sensitive to small concentrations of infiltrated molecular species. A resonance width below 0.1° has been obtained, which is sufficient to detect one monolayer of DNA covering the pore walls. In this work, a prism is used for the waveguide coupling in an arrangement that is similar to traditional surface plasmon resonance (SPR) sensing. Theoretical analysis suggests that an optimized PSi waveguide resonant sensor will show a 60-fold improvement in sensitivity when compared to a conventional SPR sensor due to the enhanced interaction between the electromagnetic field and biological material.

Keywords

sensorSinanoscale
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 934: Symposium I – Silicon-Based Microphotonics , 2006 , 0934-I10-04
Copyright
Copyright © Materials Research Society 2006

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