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High Resolution Imaging of As-Grown Sapphire Surfaces

Published online by Cambridge University Press:  25 February 2011

Tung Hsu  and
S. R. Nutt
Tung Hsu
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, AZ 85287
S. R. Nutt
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, AZ 85287
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Abstract

Surfaces of commercially grown edge-defined film-fed growth sapphire (EFG α-Al2O3) were studied in the electron microscope using both reflection electron microscopy (REM) and conventional transmission electron microscopy (TEM). The as-grown sapphire surface, ostensibly {1120}, was characterized by “rooftop” structures which were often locally periodic. These rooftop structures consisted of alternating {1120} facets and additional facets inclined a few degrees. The crystallography of the surface facets was analyzed using REM imaging of bulk specimens, and trace analysis of back-thinned plan section TEM specimens. Surface roughness was measured by stylus profilometry. and these measurements were compared to the electron microscopy observations. Fine structural features parallel to <0110> directions were also observed in both REM and TEM experiments, and these were attributed to surface steps of atomic scales.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 62: Symposium Q – Materials Problem Solving with the Transmission Electron Microscope , 1985 , 387
Copyright
Copyright © Materials Research Society 1986

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