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Growth of 130 μm Thick Epitaxial KNbO3 Film by Hydrothermal Method

Published online by Cambridge University Press:  23 January 2013

T. Shiraishi ,
H. Einishi ,
M. Ishikawa ,
T. Hasegawa ,
M. Kurosawa  and
H. Funakubo
T. Shiraishi
Affiliation:
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, J2-43, 4259 Nagatsuta-cho, Midori-ku, Yokohama, Kanagawa 226-8502, Japan
H. Einishi
Affiliation:
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, J2-43, 4259 Nagatsuta-cho, Midori-ku, Yokohama, Kanagawa 226-8502, Japan
M. Ishikawa
Affiliation:
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, J2-43, 4259 Nagatsuta-cho, Midori-ku, Yokohama, Kanagawa 226-8502, Japan Department of Clinical Engineering Faculty of Biomedical Engineering, Toin University of Yokohama, 1614 Kurogane-cho, Aoba-ku, Yokohama, 225-8503, Japan
T. Hasegawa
Affiliation:
Department of Information Processing, Tokyo Institute of Technology, G2-32, 4259 Nagatsuta-cho, Midori-ku, Yokohama, Kanagawa 226-8502, Japan
M. Kurosawa
Affiliation:
Department of Information Processing, Tokyo Institute of Technology, G2-32, 4259 Nagatsuta-cho, Midori-ku, Yokohama, Kanagawa 226-8502, Japan
H. Funakubo
Affiliation:
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, J2-43, 4259 Nagatsuta-cho, Midori-ku, Yokohama, Kanagawa 226-8502, Japan
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Abstract

KNbO3 thick films were deposited on (100)c SrRuO3//(100)SrTiO3 substrates at 240 °C for 3 h by hydrothermal method. Film thickness increased linearly with increasing the deposition number of times and 130 μm thickness was achieved by the 6 time deposition. XRD analysis showed the growth of epitaxial orthorhombic films with the mixture orientation of (100), (010) and (001). Cross-sectional SEM observation showed that the 130 μm-thick film was dense and no obvious voids inside the film. In addition, the crystal structure change along film thickness direction was not detected from the cross-sectional Raman spectral observation.

Keywords

hydrothermalfilmcrystal growth
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1494: Symposium F – Oxide Semiconductors and Thin Films , 2013 , pp. 291 - 296
Copyright
Copyright © Materials Research Society 2013 

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References

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