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Growth of (001)-Oriented Sbn Thin Films by Solid Source MOCVD

Published online by Cambridge University Press:  15 February 2011

Z. Lu ,
R. S. Feigelson ,
R. K. Route ,
R. Hiskes  and
S. A. Dicarolis
Z. Lu
Affiliation:
Materials Science and Engineering Department, Stanford University, CA 94305-2205
R. S. Feigelson
Affiliation:
Materials Science and Engineering Department, Stanford University, CA 94305-2205
R. K. Route
Affiliation:
Center for Materials Research, Stanford University, CA 94305-4045
R. Hiskes
Affiliation:
Hewlett-Packard Corporation, 3500 Deer Creek Road, Palo Alto, CA 94303
S. A. Dicarolis
Affiliation:
Hewlett-Packard Corporation, 3500 Deer Creek Road, Palo Alto, CA 94303
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Abstract

By the solid source MOCVD technique, we have deposited 2000 – 3000 Å thick single phase SrxBa1−xNb2O6 (SBN) films on (100) MgO substrates using tetramethylheptanedionate (thd) sources. X-ray diffraction (XRD) 2θ scans indicated that these films were completely (001) oriented. XRD Φ scans, however, showed the films contained four in-plane grain orientations whose volume fractions could be controlled by altering the Sr/(Sr+Ba) and Nb/(Sr+Ba) ratios in the source powders. The in-plane volume fractions did not change with the deposition rate or the cooling rate. Films with composition Sr0 58Ba0.42Nb1.94O6 had mainly two in-plane orientations. Optical waveguiding behavior was demonstrated in these films. Refractive indices were found to be no= 2.20 and ne = 2.13, as compared to no = 2.31 and ne = 2.27 for bulk SBN60.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 335: Symposium Y – Metal-Organic Chemical Vapor Deposition of Electronic Ceramics , 1993 , 59
Copyright
Copyright © Materials Research Society 1994

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