Hostname: page-component-cd9895bd7-q99xh Total loading time: 0 Render date: 2024-12-27T01:46:19.969Z Has data issue: false hasContentIssue false
  • English
  • Français

Growth and Thermal Stability of Thin Niobium Overlayers on (0001) Sapphire Substrates

Published online by Cambridge University Press:  15 February 2011

T. Wagner ,
M. Lorenz ,
P. A. Langjahr  and
M. Ruhle
T. Wagner
Affiliation:
Max-Planck-Institut ffir Metallforschung, Institut fur Werkstoffwissenschaft, 70174 Stuttgart, Germany
M. Lorenz
Affiliation:
Deutsche Forschungsanstalt fuir Luft und Raumfahrt, Institut ftir Technische Thermodynamik, 70569 Stuttgart
P. A. Langjahr
Affiliation:
Max-Planck-Institut ffir Metallforschung, Institut fur Werkstoffwissenschaft, 70174 Stuttgart, Germany
M. Ruhle
Affiliation:
Max-Planck-Institut ffir Metallforschung, Institut fur Werkstoffwissenschaft, 70174 Stuttgart, Germany
Get access

Abstract

Thin Nb films were deposited by MBE on (0001)α-Al2O3 in UHV. At a substrate temperature of 800°C, reflection high energy electron diffraction (RHEED) revealed that the film grew with the orientation relationship (planes of similar symmetry are parallel to each other): (0001)α-Al2O3 ‖ (111)Nb; [2110]α-Al2O3 ‖ [110]Nb. Investigations with conventional transmission electron. microscopy (CTEM) revealed that the film was not perfectly epitaxial after deposition. Small Nb grains with different orientations were embedded in the epitaxial Nb film. During annealing at temperatures well above the deposition temperature, secondary grain growth of the small embedded Nb grains occured, leading to a different epitaxial relationship between the Nb film and the sapphire: (0001)α-Al2O3 ‖ (110)Nb; [0110]α-Al2O3 ‖ [001]Nb.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 403: Symposium I – Polycrystalline Thin Films: Structure, Texture, Properties and Applications II , 1995 , 83
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Rühle, M., Evans, A. G., Ashby, M. F., and Hirth, J. P., Bonding, Structure and Mechanical Properties of Metal-Ceramic Interfaces, (Pergamon Press, Oxford, 1989).Google Scholar
2. Mayer, J., Flynn, C. P., and Rühle, M., Ultramicroscopy 33, 51 (1990).Google Scholar
3. Mader, W., Z. Metallkde. 80, 139 (1989).Google Scholar
4. Wagner, T., Rühle, M., Mat. Res. Soc. Symp. Proc. 357, 41 (1995).Google Scholar
5. Gautier, M., Renaud, G., Pham Van, L., Villette, B., Pollak, M., Thromat, N., Jollet, F., and Duraud, J.-P., J. Am. Ceram. Soc. 77, 323 (1994).Google Scholar
6. Durbin, S. M., Cunningham, J. E. and Flynn, C. P., J. Phys. F: Met. Phys. 12, L75 (1982).Google Scholar
7. Flynn, C. P., University of Illinois, Urbana-Champaign.Google Scholar
8. Mayer, J., Gutekunst, G., Möbus, G., Dura, J., Flynn, C. P., and Ruihle, M., Acta metall. mater. 40, S217 (1992).Google Scholar
9. Claasen, J. H., Wolf, S. A., Quadri, S. B. and Jones, L. D., J. Cryst. Growth 81, 557 (1987).Google Scholar
10. Wolf, S. A., Quadri, S. B., Claasen, J. H., Francavilla, T. L. and Dalrymple, B. J., J. Vac. Sci. Technol. A 4, 524 (1986).Google Scholar
11. Oya, G., Koishi, M. and Sawada, Y., J. Appl. Phys. 60, 1440 (1986).Google Scholar
12. Igarashi, Y. and Kanayama, M., J. Appl. Phys. 57, 849 (1985).Google Scholar
13. Nishihata, Y., Nakayama, M., Kato, H., Sano, N. and Terauchi, H., J. Appl. Phys. 60, 3523 (1986).Google Scholar
14. Wagner, T., Möbus, G. and Mtillejans, H., to be published.Google Scholar
15. Cuomo, J. J. and Angilello, J., J. Electrochem. Soc. 120, 125 (1973).Google Scholar
16. Thompson, C. V., J. Appl. Phys. 58, 763 (1985).Google Scholar
17. Thompson, C. V., Acta Metall. 36, 2929 (1988).Google Scholar
18. Wagner, T., Lorenz, M. and Rühle, M., to be published.Google Scholar
19. Jilavi, M. H., Thesis, Universitat Stuttgart (1995).Google Scholar
20. Gutekunst, G., Mayer, J. and Ruihle, M., Scripta Metallurgica et Materialia 31, 1097 (1994).Google Scholar
21. Knaus, D. and Mader, W., Ultramicroscopy 37, 247 (1991).Google Scholar
22. Mader, W., Mat. Res. Soc. Symp. Proc. 82, 403 (1987).Google Scholar
23. Mader, W. and Ruihle, M., Acta metall. 37, 853 (1989).Google Scholar