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Grazing Incidence X-Ray Reflectance Measurement of Surface and Interface Roughness on the Sub-Nanometre Scale

Published online by Cambridge University Press:  21 February 2011

M. Wormington ,
K. Sakurai ,
D.K. Bowen  and
B.K. Tanner
M. Wormington
Affiliation:
Centre for Nanotechnology and Microengineering, Department of Engineering, University of Warwick, Coventry CV4 7AL, UK Bede Scientific Software Division, University of Warwick Science Park, Coventry CV4 7EZ, UK
K. Sakurai
Affiliation:
Centre for Nanotechnology and Microengineering, Department of Engineering, University of Warwick, Coventry CV4 7AL, UK On leave from National Research Institute for Metals, Tsukuba, Japan
D.K. Bowen
Affiliation:
Centre for Nanotechnology and Microengineering, Department of Engineering, University of Warwick, Coventry CV4 7AL, UK Bede Scientific Software Division, University of Warwick Science Park, Coventry CV4 7EZ, UK
B.K. Tanner
Affiliation:
Department of Physics, University of Durham, Durham DH3 ILE, UK, and Bede Scientific Instruments Ltd., Bowburn, Durham DH6 5PF, UK
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Abstract

Grazing incidence X-ray reflectivity may be used to measure surface topography including roughness and correlation lengths to sub-nanometre precision. A study is made of a technically important surface, a carefully-polished specimen of Zerodur glass-ceramic, which has been measured by diffuse scatter of CuKα X-radiation and atomic-force profilometry methods. The data have been analysed in terms of a fractal representation of the surface correlation function. Results from the two methods agreed within their estimated errors, with the X-ray data showing roughnesses of 1.3 nm, correlation length of 1 μm and fractal parameter (bandwidth) of 0.35. The X-ray methods have a lower cut-off length, are much more rapid for averaged information and are both non-contacting and non-destructive. They also show potential for the study of interface roughness in thin films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 332: Symposium U – Determining Nanoscale Physical Properties of Materials by Microscopy and Spectroscopy , 1994 , 525
Copyright
Copyright © Materials Research Society 1994

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References

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