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From Proposal To Product: Scaling Up The Chemical Synthesis of MOCVD Oxide Precursors

Published online by Cambridge University Press:  10 February 2011

T J Leedham
T J Leedham*
Affiliation:
Inorgtech Ltd, Mildenhall, Suffolk, UK
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Abstract

An essential step in the commercialisation of the MOCVD technique is the prompt availability of reliable precursors such as volatile alkoxides and diketonates for oxide deposition. Synthesis methods must be scaled by three orders of magnitude from grams to kilos to manufacture precursors for commercial devices. Impurities determine whether an identified method is viable due to the way in which they affect yield, shelf life and performance. Deleterious contaminants include free radicals, moisture damage and raw material remnants. Such considerations dominate multi-kilo synthesis but their impact may not have been perceived at an earlier stage. By particular examples we show attention to methodology can overcome these problems.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 415: Symposium BB – Metal-Organic Chemical Vapor Deposition of Electronic Ceramics II , 1995 , 79
Copyright
Copyright © Materials Research Society 1996

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References

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