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Friction and Wear Properties of ALD Coated MEMS

Published online by Cambridge University Press:  01 February 2011

Corina Nistorica ,
Igor Gory ,
George D. Skidmore ,
Fadziso M. Mantiziba  and
Bruce E. Gnade
Corina Nistorica
Affiliation:
Zyvex Corporation, 1321 N. Plano Road, Richardson, Texas 75081
Igor Gory
Affiliation:
Zyvex Corporation, 1321 N. Plano Road, Richardson, Texas 75081
George D. Skidmore
Affiliation:
Zyvex Corporation, 1321 N. Plano Road, Richardson, Texas 75081
Fadziso M. Mantiziba
Affiliation:
Department of Electrical Engineering, University of Texas at Dallas, Richardson, Texas 75083
Bruce E. Gnade
Affiliation:
Department of Electrical Engineering, University of Texas at Dallas, Richardson, Texas 75083
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Abstract

A comparative study of the microtribological properties of native oxide covered single crystal silicon and silicon coated with atomic layer deposited (ALD) alumina films is presented. The dry friction and wear behavior were investigated using a novel microelectromechanical system (MEMS) tribotester. The coefficient of friction for alumina coated surfaces and for silicon uncoated surfaces was monitored before and after wear. The friction versus normal load curves of uncoated silicon can be described by a Johnson-Kendall-Roberts model with pressure dependent shear strength while for the alumina coated surfaces, a linear dependence between the friction force and the normal load was found. Both uncoated silicon surfaces and alumina coated surfaces showed a decrease of the friction force with the number of sliding cycles.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 841: Symposium R – Fundamentals of Nanoindentation and Nanotribology III , 2004 , R9.16
Copyright
Copyright © Materials Research Society 2005

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